Comment asml SNF 2010-03-19 16:28:20: Dedicated SRD cassette

king at snf.stanford.edu king at snf.stanford.edu
Fri Mar 19 16:28:21 PDT 2010


A suggestion to consider dedicating a cleaner teflon cassette for the litho SRD, to be used before going into the ASML tool.  Tthe random litho cassettes frequently have lots of PR particles (as you'd expect, not a complaint).  Thanks. 




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