Problem asml SNF 2010-03-21 22:55:44: Software hung in Batch Definition

rik at rik at
Sun Mar 21 22:55:45 PDT 2010

Ran my wafer through. When the system returned to the "Batch Definition" screen from the "Batch run" screen, it stopped responding. There was a "invalid callback: 44" message in the log. Not sure if it pertains to the issue. Was able to unload the reticles. 

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