Comment asml SNF 2010-03-19 16:28:20: Dedicated SRD cassette
mahnaz at stanford.edu
Mon Mar 29 09:06:48 PDT 2010
I think that is a good idea. Let me talk to Uli and see How we will go
about designation of it. I have to find a different color box.
Uli any Ideas?
king at snf.stanford.edu wrote:
> A suggestion to consider dedicating a cleaner teflon cassette for the litho SRD, to be used before going into the ASML tool. Tthe random litho cassettes frequently have lots of PR particles (as you'd expect, not a complaint). Thanks.
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