From kreifels at snf.stanford.edu Tue May 4 07:51:29 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Tue, 4 May 2010 07:51:29 -0700 Subject: Comment asml SNF 2010-05-04 07:51:28: starting daily PM and Lamp change Message-ID: starting daily PM and Lamp change. From lindaohara at snf.stanford.edu Tue May 4 10:16:17 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 4 May 2010 10:16:17 -0700 Subject: Comment asml SNF 2010-05-04 10:16:16: Hotspot Message-ID: Hotspot at 6:00 o'clock position. Mark Cleaned E-Chuck. Hotspot check is ok now. From mahnaz at snf.stanford.edu Tue May 4 11:22:45 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 4 May 2010 11:22:45 -0700 Subject: Shutdown asml SNF 2010-05-04 11:22:45: uniformity after the lamp change Message-ID: was not at spec, need to investigate. From mahnaz at snf.stanford.edu Tue May 4 13:17:37 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 4 May 2010 13:17:37 -0700 Subject: Shutdown asml SNF 2010-05-04 11:22:45: uniformity after the lamp change Message-ID: I shut down the system because one labmembet` whom has .5 um of Aol on his wafer had issue with the system. It looked as though did not get enough exposure with showing some ring around his wafers I ran some of my wafers, si wafer came out good. Ran a quartz wafer with 955, 1 um resisr`t and resolved .5 um. followed by exposing 4 si and 4 more quartz, all looked okay. Linda did another particle on the chuck and looked very good. From lindaohara at snf.stanford.edu Wed May 5 08:33:56 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 5 May 2010 08:33:56 -0700 Subject: Comment asml SNF 2010-05-05 08:33:56: ASML Monthly PM Message-ID: Begin ASML Monthly PM From kreifels at snf.stanford.edu Wed May 5 15:15:30 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Wed, 5 May 2010 15:15:30 -0700 Subject: Comment asml SNF 2010-05-05 15:15:29: MPM update day 1 completed Message-ID: MPM update, day 1 completed, wil continue in the morning 7am From mahnaz at snf.stanford.edu Wed May 5 15:47:11 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 5 May 2010 15:47:11 -0700 Subject: Problem asml SNF 2010-05-05 15:47:09: exposure drift...read Message-ID: For some reason, it seems that the exposure has drifted on the tool. 65mj exposure for 1 um of 3612 which has worked for this specifics process was not sufficient today. we will d a E0 on the tool for both 3612 and 955 resist tomorrow Please do a test wafer before committing your lot. From gsosa at snf.stanford.edu Thu May 6 09:48:04 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 6 May 2010 09:48:04 -0700 Subject: Comment asml SNF 2010-05-06 09:48:04: Exposure testing Message-ID: ASML FSE's are running test on the illumination system to verify the exposure system is in spec. From kreifels at snf.stanford.edu Thu May 6 12:12:18 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Thu, 6 May 2010 12:12:18 -0700 Subject: Comment asml SNF 2010-05-06 12:12:17: energy check completed Message-ID: completed the energy check and all data show the system is stable. Returning system to Stanford From mahnaz at snf.stanford.edu Thu May 6 12:50:15 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 6 May 2010 12:50:15 -0700 Subject: Problem asml SNF 2010-05-05 15:47:09: exposure drift...read Message-ID: Asml did test the intensity and uniformity check, all good. E0 in spec as well. From mahnaz at snf.stanford.edu Thu May 6 12:50:53 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 6 May 2010 12:50:53 -0700 Subject: Comment asml SNF 2010-05-05 08:33:56: ASML Monthly PM Message-ID: clear From mahnaz at snf.stanford.edu Thu May 6 12:51:04 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 6 May 2010 12:51:04 -0700 Subject: Comment asml SNF 2010-05-04 10:16:16: Hotspot Message-ID: From mahnaz at snf.stanford.edu Thu May 6 12:51:16 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 6 May 2010 12:51:16 -0700 Subject: Comment asml SNF 2010-04-22 09:02:49: Hotspot ck Message-ID: From mahnaz at snf.stanford.edu Thu May 6 12:51:30 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 6 May 2010 12:51:30 -0700 Subject: Comment asml SNF 2010-04-09 22:19:24: It worked for 1 layer on 1 mask Message-ID: From mahnaz at snf.stanford.edu Thu May 6 12:52:19 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 6 May 2010 12:52:19 -0700 Subject: Comment asml SNF 2010-04-05 18:36:45: found reticle box open Message-ID: From mahnaz at snf.stanford.edu Thu May 6 12:52:32 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 6 May 2010 12:52:32 -0700 Subject: Comment asml SNF 2010-04-07 14:48:19: Quarterly PM is completed Message-ID: From mahnaz at snf.stanford.edu Thu May 6 12:52:57 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 6 May 2010 12:52:57 -0700 Subject: Comment asml SNF 2010-05-06 09:48:04: Exposure testing Message-ID: done From mahnaz at snf.stanford.edu Thu May 6 12:53:15 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 6 May 2010 12:53:15 -0700 Subject: Comment asml SNF 2010-05-04 07:51:28: starting daily PM and Lamp change Message-ID: From mahnaz at snf.stanford.edu Thu May 6 12:54:13 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 6 May 2010 12:54:13 -0700 Subject: Comment asml SNF 2010-04-27 15:30:29: released ASML to 17:00 Message-ID: From mahnaz at snf.stanford.edu Thu May 6 12:54:24 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 6 May 2010 12:54:24 -0700 Subject: Comment asml SNF 2010-04-15 08:56:52: Lens inspection and relay work starting Message-ID: From lindaohara at snf.stanford.edu Fri May 7 09:51:47 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 7 May 2010 09:51:47 -0700 Subject: Comment asml SNF 2010-05-07 09:51:46: ASML Released Reservations 10:00-14:00 Message-ID: From narii at snf.stanford.edu Sun May 9 21:52:10 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sun, 9 May 2010 21:52:10 -0700 Subject: Comment asml SNF 2010-05-09 21:52:09: Output cassett is missing Message-ID: From narii at snf.stanford.edu Sun May 9 21:54:18 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sun, 9 May 2010 21:54:18 -0700 Subject: Comment asml SNF 2010-05-09 21:54:17: Found the cassett Message-ID: Looks like previous user left it around developer. From cmcg at snf.stanford.edu Tue May 11 00:59:49 2010 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Tue, 11 May 2010 00:59:49 -0700 Subject: Problem asml SNF 2010-05-11 00:59:49: data logging file full Message-ID: From gsosa at snf.stanford.edu Tue May 11 09:50:04 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 11 May 2010 09:50:04 -0700 Subject: Problem asml SNF 2010-05-11 00:59:49: data logging file full Message-ID: Opened new logging file From gsosa at snf.stanford.edu Tue May 11 09:51:21 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 11 May 2010 09:51:21 -0700 Subject: Comment asml SNF 2010-05-11 09:51:20: Erratic Mouse Message-ID: Reseated mouse and keyboard connections. Reset apps and operating system s/w. Mouse tested OK. From gsosa at snf.stanford.edu Wed May 12 06:50:03 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 12 May 2010 06:50:03 -0700 Subject: Comment asml SNF 2010-04-01 13:59:32: hotspot removed Message-ID: To Archives From gsosa at snf.stanford.edu Wed May 12 06:50:12 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 12 May 2010 06:50:12 -0700 Subject: Comment asml SNF 2010-04-05 07:31:30: Hotspot 04/02 Friday Message-ID: To Archives From gsosa at snf.stanford.edu Wed May 12 06:50:20 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 12 May 2010 06:50:20 -0700 Subject: Comment asml SNF 2010-04-06 15:47:46: QPM day 1 is completed hotspot is gone. Message-ID: To Archives From gsosa at snf.stanford.edu Wed May 12 06:50:30 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 12 May 2010 06:50:30 -0700 Subject: Comment asml SNF 2010-04-14 09:39:39: hotspot detected, chuck is clean now Message-ID: To Archives From gsosa at snf.stanford.edu Wed May 12 06:50:38 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 12 May 2010 06:50:38 -0700 Subject: Comment asml SNF 2010-04-14 10:17:36: ASML Released Reservations 10:30-13:00 Message-ID: To Archives From gsosa at snf.stanford.edu Wed May 12 06:51:45 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 12 May 2010 06:51:45 -0700 Subject: Comment asml SNF 2010-04-15 12:04:58: lens check and extraction hood relay completed Message-ID: To Archives From gsosa at snf.stanford.edu Wed May 12 06:51:52 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 12 May 2010 06:51:52 -0700 Subject: Comment asml SNF 2010-04-20 10:14:30: ASML Released Reservations to 12:00 Message-ID: To Archives From gsosa at snf.stanford.edu Wed May 12 06:52:01 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 12 May 2010 06:52:01 -0700 Subject: Comment asml SNF 2010-04-16 10:03:32: Hotspot 4/16 Message-ID: To Archives From gsosa at snf.stanford.edu Wed May 12 06:52:09 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 12 May 2010 06:52:09 -0700 Subject: Comment asml SNF 2010-04-23 10:05:29: Daily PM, Hot spot, lamp change. Message-ID: To Archives From gsosa at snf.stanford.edu Wed May 12 06:52:21 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 12 May 2010 06:52:21 -0700 Subject: Comment asml SNF 2010-04-28 13:36:02: Backside Contamination Message-ID: To Archives From gsosa at snf.stanford.edu Wed May 12 06:52:26 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 12 May 2010 06:52:26 -0700 Subject: Comment asml SNF 2010-05-05 15:15:29: MPM update day 1 completed Message-ID: To Archives From gsosa at snf.stanford.edu Wed May 12 06:52:36 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 12 May 2010 06:52:36 -0700 Subject: Comment asml SNF 2010-05-07 09:51:46: ASML Released Reservations 10:00-14:00 Message-ID: To Archives From gsosa at snf.stanford.edu Wed May 12 06:52:44 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 12 May 2010 06:52:44 -0700 Subject: Comment asml SNF 2010-05-09 21:52:09: Output cassett is missing Message-ID: To Archives From gsosa at snf.stanford.edu Wed May 12 06:52:51 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 12 May 2010 06:52:51 -0700 Subject: Comment asml SNF 2010-05-09 21:54:17: Found the cassett Message-ID: To Archives From lindaohara at snf.stanford.edu Wed May 12 10:06:19 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 12 May 2010 10:06:19 -0700 Subject: Comment asml SNF 2010-05-12 10:06:19: Hotspot chk Message-ID: hotspot at 3 o'clock position. Gary cleaned E-Chuck. Hotspot check ok, no hotspots From lindaohara at snf.stanford.edu Thu May 13 10:14:52 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 13 May 2010 10:14:52 -0700 Subject: Comment asml SNF 2010-05-13 10:14:52: ASML Released Reservations until 12:00pm Message-ID: From lindaohara at snf.stanford.edu Fri May 14 10:14:13 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 14 May 2010 10:14:13 -0700 Subject: Comment asml SNF 2010-05-14 10:14:13: ASML Training Message-ID: From kreifels at snf.stanford.edu Fri May 14 12:14:16 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Fri, 14 May 2010 12:14:16 -0700 Subject: Comment asml SNF 2010-05-14 12:14:15: Hotspot is removed Message-ID: During the daily PM, a hotspot was detected, clean the chuck and ran a verificaion , hotspot is gone. returned system to Stanford. From lindaohara at snf.stanford.edu Tue May 18 11:37:57 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 18 May 2010 11:37:57 -0700 Subject: Comment asml SNF 2010-05-18 11:37:57: ASML Released Reservations 12:00-14:00 Message-ID: From lindaohara at snf.stanford.edu Wed May 19 12:58:52 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 19 May 2010 12:58:52 -0700 Subject: Comment asml SNF 2010-05-19 12:58:52: ASML Released Reservations 12:00-14:00 Message-ID: From mahnaz at snf.stanford.edu Thu May 20 14:08:06 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 20 May 2010 14:08:06 -0700 Subject: Comment asml SNF 2010-05-18 11:37:57: ASML Released Reservations 12:00-14:00 Message-ID: noted From mahnaz at snf.stanford.edu Thu May 20 14:08:16 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 20 May 2010 14:08:16 -0700 Subject: Comment asml SNF 2010-05-19 12:58:52: ASML Released Reservations 12:00-14:00 Message-ID: noted From mahnaz at snf.stanford.edu Thu May 20 14:08:53 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 20 May 2010 14:08:53 -0700 Subject: Comment asml SNF 2010-05-13 10:14:52: ASML Released Reservations until 12:00pm Message-ID: noted From mahnaz at snf.stanford.edu Thu May 20 14:10:03 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 20 May 2010 14:10:03 -0700 Subject: Comment asml SNF 2010-05-14 10:14:13: ASML Training Message-ID: done From lindaohara at snf.stanford.edu Fri May 21 09:26:32 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 21 May 2010 09:26:32 -0700 Subject: Comment asml SNF 2010-05-21 09:26:31: ASML Released Reservations 10:00-14:00 Message-ID: From lindaohara at snf.stanford.edu Tue May 25 09:02:57 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 25 May 2010 09:02:57 -0700 Subject: Shutdown asml SNF 2010-05-25 09:02:56: Level Sensor Failed Message-ID: Error during IQC Perform Measurement From gsosa at snf.stanford.edu Tue May 25 15:32:03 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 25 May 2010 15:32:03 -0700 Subject: Comment asml SNF 2010-05-25 15:32:02: Stepper is Down Message-ID: ASML field service is working on the system. He will return tomorrow to replace the level sensor laser PC board. From gsosa at snf.stanford.edu Wed May 26 15:50:27 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 26 May 2010 15:50:27 -0700 Subject: Comment asml SNF 2010-05-26 15:50:26: Tool Status 5/26 Message-ID: replaced ls q branch projection motor and verified functionality. ran level sensor performance and all values are in specification ran iqc and and system is showing some parameters that are oos. Those values will be ok once system has stabilized. Earliest that system will be stable is after 1800. please also verify hotspot prior to releasing for use. From gsosa at snf.stanford.edu Wed May 26 16:10:02 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 26 May 2010 16:10:02 -0700 Subject: Comment asml SNF 2010-05-26 16:10:01: Tool Status 5/26 Message-ID: Stepper is stabilizing after FSE repairs. We will let the tool stabilize until tomorrow morning. We will do the standard daily testing to determine condition of tool. Please check back in Coral for further updated and tool status. . From lindaohara at snf.stanford.edu Thu May 27 09:04:23 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 27 May 2010 09:04:23 -0700 Subject: Comment asml SNF 2010-05-27 09:04:23: ASML Down Message-ID: ASML warning says "System Correction Drift is not valid" ASML CSE is coming in to work on problem. From lindaohara at snf.stanford.edu Thu May 27 13:26:30 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 27 May 2010 13:26:30 -0700 Subject: Shutdown asml SNF 2010-05-25 09:02:56: Level Sensor Failed Message-ID: System ok to use, quals are all in spec. From gsosa at snf.stanford.edu Thu May 27 13:50:24 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 27 May 2010 13:50:24 -0700 Subject: Comment asml SNF 2010-05-27 13:50:23: Stepper is Up 5/27 Message-ID: The stepper is back up. The FSE did focus system setup to minimize the image tilts in X and Y and redefine an new reference state. All daily quals passed. Stepper ready to use. From jwpchen at snf.stanford.edu Fri May 28 00:13:05 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Fri, 28 May 2010 00:13:05 -0700 Subject: Problem asml SNF 2010-05-28 00:13:05: SMIF loader error Message-ID: when requesting to read reticles, machine errors with No Reticle SMIF box present. tried all three SMIF pods with same result. previous user got it to work after a few retries, but didn't work for me From sdogbe at snf.stanford.edu Fri May 28 07:01:04 2010 From: sdogbe at snf.stanford.edu (sdogbe at snf.stanford.edu) Date: Fri, 28 May 2010 07:01:04 -0700 Subject: Problem asml SNF 2010-05-28 07:01:04: SMIF Loader Error Message-ID: Equipment unable to load mask From gsosa at snf.stanford.edu Fri May 28 07:35:04 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 28 May 2010 07:35:04 -0700 Subject: Shutdown asml SNF 2010-05-28 07:35:03: Reticles not reading Message-ID: Cannot read barcodes. Reticle box is not loading and error error indicates SMIF box not present. Diagnosed and fould that 1 of the 2 SMIF box present switches is broken( Upper/Left actuator switch). Appears that the actuator arm is broken. Have advised ASML that the stepper is down. From gsosa at snf.stanford.edu Fri May 28 09:00:24 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 28 May 2010 09:00:24 -0700 Subject: Comment asml SNF 2010-05-28 09:00:23: Update 5/28 Message-ID: FSE from ASML expected in around 10:30AM today to repair thte tool. From joho at snf.stanford.edu Fri May 28 13:52:06 2010 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Fri, 28 May 2010 13:52:06 -0700 Subject: Comment asml SNF 2010-05-28 13:52:05: ASML on site Message-ID: Starting to investigate SMIF pod issue From gsosa at snf.stanford.edu Fri May 28 16:11:57 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 28 May 2010 16:11:57 -0700 Subject: Comment asml SNF 2010-05-28 16:11:56: Tool Status 5/28 Message-ID: The stepper is still down. The FSE's replaced the library top ring assembly. This fixed the original problem of the SMIF Pod not being detected. Now there is a different problem with the reticle box Lock/Unlock mechanism. The system is not detecting that the SMIF Pod is unlocked. Suspecting a bad sensing VSO on the new replacemnet part. FSE's will attempt to aquire another top ring assembly. IF so, arrangements will be madefor the FSE to replace it tomorrow. Please check back in Coral for further updates. From gsosa at snf.stanford.edu Sat May 29 14:49:05 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sat, 29 May 2010 14:49:05 -0700 Subject: Shutdown asml SNF 2010-05-28 07:35:03: Reticles not reading Message-ID: ASML FSE's replaced another library top ring assembly. The 1st one they installed was bad. All reticle library functions and reticle loading tested- All OK. Performed daily quals- All OK. System is ready to use. From gsosa at snf.stanford.edu Sat May 29 14:50:47 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sat, 29 May 2010 14:50:47 -0700 Subject: Comment asml SNF 2010-05-29 14:50:47: Tool Update 5/29 Message-ID: The stepper is back up. ASML FSE's replaced another library top ring assembly. The 1st one they installed was bad. All reticle library functions and reticle loading tested- All OK. Performed daily quals- All OK. System is ready to use.