From gsosa at snf.stanford.edu Mon Nov 1 09:47:32 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 1 Nov 2010 09:47:32 -0700 Subject: Comment asml SNF 2010-11-01 09:47:32: Hotspots 11/1 Message-ID: 2 hotspots on test wafer( 3 and 6 oclock). Cleaned E-chuck and retested.Retest OK. Daily quals completed. System ok to use. From mahnaz at snf.stanford.edu Mon Nov 1 11:35:39 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 1 Nov 2010 11:35:39 -0700 Subject: Problem asml SNF 2010-11-01 11:35:38: lost track of reticle Message-ID: exposed one wf and when wanted to do the rest, system could not remember where the reticle is and asking for reinitilize the reticle loader. Gary is coming to help. From gsosa at snf.stanford.edu Mon Nov 1 11:58:00 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 1 Nov 2010 11:58:00 -0700 Subject: Problem asml SNF 2010-11-01 11:35:38: lost track of reticle Message-ID: Verified reticle location inside of tool. Reticle sitting safely in the gripper. re-initialized reticle handling and unloaded retilvne to smiff box. Did full startup- OK. User processed 3 wafers with same reticle with no problems. From lindaohara at snf.stanford.edu Tue Nov 2 10:18:13 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 2 Nov 2010 10:18:13 -0700 Subject: Comment asml SNF 2010-11-02 10:18:12: ASML Released Reservations 10:30-14:00 Message-ID: From gsosa at snf.stanford.edu Wed Nov 3 06:57:08 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 3 Nov 2010 06:57:08 -0700 Subject: Comment asml SNF 2010-10-12 08:09:12: 6" Conversion Message-ID: To Archive From gsosa at snf.stanford.edu Wed Nov 3 06:57:23 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 3 Nov 2010 06:57:23 -0700 Subject: Comment asml SNF 2010-10-12 13:57:36: 6" Conversion Completed Message-ID: To Archive From gsosa at snf.stanford.edu Wed Nov 3 06:57:41 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 3 Nov 2010 06:57:41 -0700 Subject: Comment asml SNF 2010-10-13 20:06:52: found system at unix prompt Message-ID: To Archive From gsosa at snf.stanford.edu Wed Nov 3 06:57:46 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 3 Nov 2010 06:57:46 -0700 Subject: Comment asml SNF 2010-10-15 14:51:25: asml up Message-ID: To Archive From gsosa at snf.stanford.edu Wed Nov 3 06:57:52 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 3 Nov 2010 06:57:52 -0700 Subject: Comment asml SNF 2010-10-19 15:20:24: patch back-out/install on disk0 Message-ID: To Archive From gsosa at snf.stanford.edu Wed Nov 3 06:57:59 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 3 Nov 2010 06:57:59 -0700 Subject: Comment asml SNF 2010-10-27 08:28:35: 6" Message-ID: To Archive From gsosa at snf.stanford.edu Wed Nov 3 06:58:21 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 3 Nov 2010 06:58:21 -0700 Subject: Comment asml SNF 2010-10-28 07:43:28: Start 6" Conversion Message-ID: To Archive From gsosa at snf.stanford.edu Wed Nov 3 06:58:29 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 3 Nov 2010 06:58:29 -0700 Subject: Comment asml SNF 2010-10-28 07:56:35: Starting 6in conversion Message-ID: To Archive From gsosa at snf.stanford.edu Wed Nov 3 06:58:33 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 3 Nov 2010 06:58:33 -0700 Subject: Comment asml SNF 2010-10-28 12:13:56: asml back to 4 inch Message-ID: To Archive From gsosa at snf.stanford.edu Wed Nov 3 06:58:47 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 3 Nov 2010 06:58:47 -0700 Subject: Comment asml SNF 2010-10-01 09:56:28: Hotspots 10/1/10 Message-ID: To Archive From lindaohara at snf.stanford.edu Wed Nov 3 08:53:13 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 3 Nov 2010 08:53:13 -0700 Subject: Comment asml SNF 2010-11-03 08:53:13: ASML Released Reservations 9:00-14:00 Message-ID: From mnakamura at snf.stanford.edu Thu Nov 4 12:26:31 2010 From: mnakamura at snf.stanford.edu (mnakamura at snf.stanford.edu) Date: Thu, 4 Nov 2010 12:26:31 -0700 Subject: Comment asml SNF 2010-11-04 12:26:30: ASML Released Reservations 12:30-14:00 Message-ID: From lindaohara at snf.stanford.edu Fri Nov 5 09:00:08 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 5 Nov 2010 09:00:08 -0700 Subject: Comment asml SNF 2010-11-05 09:00:07: ASML Released Reservations 9:00-13:00 Message-ID: From jcdoll at snf.stanford.edu Sun Nov 7 22:51:44 2010 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Sun, 7 Nov 2010 22:51:44 -0800 Subject: Problem asml SNF 2010-11-07 22:51:43: wafer missing Message-ID: wafer vanished during processing. tool working fine, but wafer might be in the system somewhere. From gsosa at snf.stanford.edu Mon Nov 8 07:00:21 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 8 Nov 2010 07:00:21 -0800 Subject: Shutdown asml SNF 2010-11-08 07:00:21: Possible wafer missing Message-ID: Possible wafer missing inside of system. Need to investigate From gsosa at snf.stanford.edu Mon Nov 8 09:33:26 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 8 Nov 2010 09:33:26 -0800 Subject: Shutdown asml SNF 2010-11-08 07:00:21: Possible wafer missing Message-ID: Found missing wafer intact on system baseplate. Based on the data from the batch report and the event log it is highly likely that there were 2 wafers in 1 slot. Suspect that the 2 wafers transfered to the pre-aligner. That is what caused the pre-alignment error( The P/A system could not determine the wafer flat. The wafer was rejected and during the transfer to the E-chuck by the Dipod, the top wafer flew off. Luckily it did not land in a critical part of the tool, such as the wafer stage. This is a message for all users: IF you suspect that a wafer is lost in the tool, Shut the tool down and notify staff. Had the wafer landed on the granite it could have broken or been broken by the movement of the stage.Continued use under this condition could severley damage the stage. From gsosa at snf.stanford.edu Mon Nov 8 09:33:31 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 8 Nov 2010 09:33:31 -0800 Subject: Problem asml SNF 2010-11-07 22:51:43: wafer missing Message-ID: Found missing wafer intact on system baseplate. Based on the data from the batch report and the event log it is highly likely that there were 2 wafers in 1 slot. Suspect that the 2 wafers transfered to the pre-aligner. That is what caused the pre-alignment error( The P/A system could not determine the wafer flat. The wafer was rejected and during the transfer to the E-chuck by the Dipod, the top wafer flew off. Luckily it did not land in a critical part of the tool, such as the wafer stage. This is a message for all users: IF you suspect that a wafer is lost in the tool, Shut the tool down and notify staff. Had the wafer landed on the granite it could have broken or been broken by the movement of the stage.Continued use under this condition could severley damage the stage. From gsosa at snf.stanford.edu Mon Nov 8 09:34:57 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 8 Nov 2010 09:34:57 -0800 Subject: Comment asml SNF 2010-11-08 09:34:56: Hotspot 11/8 Message-ID: Hotspot on test wafer near 7 Oclock position. Cleaned the E-chuck with tooling. Retest OK. Daily qual completed From mahnaz at snf.stanford.edu Mon Nov 8 11:01:51 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 8 Nov 2010 11:01:51 -0800 Subject: Problem asml SNF 2010-11-08 11:01:51: labmember ran wf with particles Message-ID: Gary is checking the system. From gsosa at snf.stanford.edu Mon Nov 8 11:46:00 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 8 Nov 2010 11:46:00 -0800 Subject: Problem asml SNF 2010-11-08 11:01:51: labmember ran wf with particles Message-ID: Exposed a hotspot wafer. There was a hotspot on the right side of the major flat. Cleaned the E-chuck with tooling and retested. Re-test came out good. From lindaohara at snf.stanford.edu Tue Nov 9 09:05:28 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 9 Nov 2010 09:05:28 -0800 Subject: Comment asml SNF 2010-11-09 09:05:28: ASML Released Reservations 9:30-14:00 Message-ID: From joho at snf.stanford.edu Wed Nov 10 15:55:47 2010 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Wed, 10 Nov 2010 15:55:47 -0800 Subject: Comment asml SNF 2010-11-10 15:55:46: Day 1 of the PM is complete Message-ID: System is ready for lab members to use. Completed daily quals after the PM and everything is in spec. From mahnaz at snf.stanford.edu Thu Nov 11 14:34:32 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 11 Nov 2010 14:34:32 -0800 Subject: Shutdown asml SNF 2010-11-11 14:34:30: Reticle table tilt out of spec Message-ID: Due to reticle tilt being out of spec the system will be down till tomorrw. Joey will be back with correct instrument to adjust for that. I keep telling you keep the back of your wafers clean. From gsosa at snf.stanford.edu Thu Nov 11 14:37:43 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Nov 2010 14:37:43 -0800 Subject: Shutdown asml SNF 2010-11-11 14:37:43: Stepper Down Message-ID: Red/Blue test indicated out of spec reticle tilt. Vendor needs to bring in special tooling to adjust reticle tilt. Vendor will return tomorrow to dajust reticle tilt and to complete the PM. From joho at snf.stanford.edu Fri Nov 12 09:56:59 2010 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Fri, 12 Nov 2010 09:56:59 -0800 Subject: Comment asml SNF 2010-11-12 09:56:58: ASML update Message-ID: Reticle Table Adjustment made, verified in spec. Running a hotspot wafer, and will start the 6in conversion in about 10 minutes. From joho at snf.stanford.edu Fri Nov 12 11:19:42 2010 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Fri, 12 Nov 2010 11:19:42 -0800 Subject: Shutdown asml SNF 2010-11-11 14:37:43: Stepper Down Message-ID: Issue resolved From joho at snf.stanford.edu Fri Nov 12 11:20:04 2010 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Fri, 12 Nov 2010 11:20:04 -0800 Subject: Shutdown asml SNF 2010-11-11 14:34:30: Reticle table tilt out of spec Message-ID: Reticle Table Tilts adjusted, and verified in spec From joho at snf.stanford.edu Fri Nov 12 14:47:23 2010 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Fri, 12 Nov 2010 14:47:23 -0800 Subject: Comment asml SNF 2010-11-12 14:47:21: ASML UP Message-ID: All, the ASML is back to 4in and is available to lab member's agian. Daily quals completed, all data look's good. From cursive at snf.stanford.edu Sat Nov 13 17:49:52 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Sat, 13 Nov 2010 17:49:52 -0800 Subject: Problem asml SNF 2010-11-13 17:49:51: voltage variateion during deposition Message-ID: voltage variation range from 470V to 510V run #8 240 sec Al deposition From gsosa at snf.stanford.edu Mon Nov 15 07:00:29 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 15 Nov 2010 07:00:29 -0800 Subject: Problem asml SNF 2010-11-13 17:49:51: voltage variateion during deposition Message-ID: I believe this is the wrong tool. From gsosa at snf.stanford.edu Mon Nov 15 09:03:16 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 15 Nov 2010 09:03:16 -0800 Subject: Comment asml SNF 2010-11-15 09:03:15: Hotspot 11/15 Message-ID: 1 hotspot on test wafer near major flat. Cleaned the E-chuck and retested. OK now. Daily quals completed. From ericp at snf.stanford.edu Tue Nov 16 23:36:58 2010 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Tue, 16 Nov 2010 23:36:58 -0800 Subject: Problem asml SNF 2010-11-16 23:36:57: coral interlock sticking Message-ID: I initially enabled the tool, and pushed run. Tool froze as it does when you forget to enable. I looked and the coral "ON" llight was not lit, but Coral showed me as enabled. I cycled on Coral a few times, and the "ON" light eventually lit. I was then able to run without a problem. From gsosa at snf.stanford.edu Wed Nov 17 11:13:12 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 17 Nov 2010 11:13:12 -0800 Subject: Comment asml SNF 2010-11-17 11:13:11: Hotspot 11/17 Message-ID: Small hotspot at wafer edge ~10 Oclock. Cleaned Echuck and retested. All OK. From lindaohara at snf.stanford.edu Wed Nov 17 12:16:55 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 17 Nov 2010 12:16:55 -0800 Subject: Comment asml SNF 2010-11-17 12:16:55: ASML Released Reservations 12:30-14:00 Message-ID: From lindaohara at snf.stanford.edu Wed Nov 17 12:18:54 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 17 Nov 2010 12:18:54 -0800 Subject: Comment asml SNF 2010-11-17 12:18:54: ASML Released Reservation 12:30 Message-ID: From gsosa at snf.stanford.edu Wed Nov 17 16:30:43 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 17 Nov 2010 16:30:43 -0800 Subject: Problem asml SNF 2010-11-16 23:36:57: coral interlock sticking Message-ID: Checked all Coral connections and tested coral function-OK. Event log indicated some other fatal type error with the wafer handling which required a reset. . From lindaohara at snf.stanford.edu Thu Nov 18 07:57:49 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 18 Nov 2010 07:57:49 -0800 Subject: Comment asml SNF 2010-11-18 07:57:49: ASML Demo on Disk 0 Message-ID: Processing wafers on the other Disk 0 for ASML Work From mnakamura at snf.stanford.edu Thu Nov 18 12:46:24 2010 From: mnakamura at snf.stanford.edu (mnakamura at snf.stanford.edu) Date: Thu, 18 Nov 2010 12:46:24 -0800 Subject: Comment asml SNF 2010-11-18 12:46:23: hotspot - 11/18 Message-ID: cleaned a hotspot. re-tested. clean now. From vilanova at snf.stanford.edu Thu Nov 18 13:55:30 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 18 Nov 2010 13:55:30 -0800 Subject: Comment asml SNF 2010-11-18 13:55:30: ASML Released Reservation from 2:00pm to 4;;00pm Message-ID: ASML Released Reservation from 2:00pm to 4;;00pm From lindaohara at snf.stanford.edu Fri Nov 19 09:22:19 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 19 Nov 2010 09:22:19 -0800 Subject: Comment asml SNF 2010-11-19 09:22:19: Hotspot Message-ID: Hotspot at 3 o'clock position, gary will clean E-Chuck. From gsosa at snf.stanford.edu Fri Nov 19 12:32:00 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 19 Nov 2010 12:32:00 -0800 Subject: Comment asml SNF 2010-11-19 12:32:00: Hotspot 11/19 Message-ID: Hotspot on test wafer. Cleaned Echuck with tooling and retested. Retest OK. From gsosa at snf.stanford.edu Tue Nov 23 10:16:47 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 23 Nov 2010 10:16:47 -0800 Subject: Comment asml SNF 2010-11-23 10:16:47: Reservations released 11/23 Message-ID: ASML reservations released for today 11/23. Tool available for use. From gsosa at snf.stanford.edu Wed Nov 24 10:02:47 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 24 Nov 2010 10:02:47 -0800 Subject: Comment asml SNF 2010-11-24 10:02:46: Hotspot 11/24 Message-ID: 1 hotspot at 3 Oclock. Cleaned Echuck with tooling. Retest good From eperalta at snf.stanford.edu Thu Nov 25 00:57:12 2010 From: eperalta at snf.stanford.edu (eperalta at snf.stanford.edu) Date: Thu, 25 Nov 2010 00:57:12 -0800 Subject: Shutdown asml SNF 2010-11-25 00:57:12: Wafer Handler won't move Message-ID: Started running a batch and the wafer was rejected. It then displayed the following error: "A wafer is probably lost in the machine, which was expected on: inp robotinp robotinp robotinp robotinp robot. Please contact a service engineer, to find this wafer". However, the wafer is in the first slot of the input casette. It also wouldn't release my reticle via the standard option "4-exchange reticle box" so i had to use option "5-remove reticles from machine". I tried to perfrom a "Start-up" (both fast and full) to see if reinitializing the wafer handler system would fix the problem and I could avoid shutting the tool down but it failed to initialize the wafer handler drivers because of the "lost wafer" error. From gsosa at snf.stanford.edu Sat Nov 27 12:05:34 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sat, 27 Nov 2010 12:05:34 -0800 Subject: Shutdown asml SNF 2010-11-25 00:57:12: Wafer Handler won't move Message-ID: Removed stranded wafer from system. Did full startup-OK. Cleaned the robot arm. visual inspection of users wafer- OK. Granite test-OK. Cycleled 20+ wafers through system with test run. All wafer handling functions OK. System OK to use. From gsosa at snf.stanford.edu Mon Nov 29 07:22:52 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 07:22:52 -0800 Subject: Comment asml SNF 2010-10-08 08:46:34: Hotspots 10/8 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Nov 29 07:22:57 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 07:22:57 -0800 Subject: Comment asml SNF 2010-10-18 10:10:18: Hotspots 10/18 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Nov 29 07:23:01 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 07:23:01 -0800 Subject: Comment asml SNF 2010-10-20 08:49:34: Hotspot at 7 o'clock position Message-ID: To Archive From gsosa at snf.stanford.edu Mon Nov 29 07:23:06 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 07:23:06 -0800 Subject: Comment asml SNF 2010-10-20 10:41:44: Hotspot Ck Message-ID: To Archive From gsosa at snf.stanford.edu Mon Nov 29 07:23:11 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 07:23:11 -0800 Subject: Comment asml SNF 2010-10-22 11:15:25: Hotspot Ck Message-ID: To Archive From gsosa at snf.stanford.edu Mon Nov 29 07:23:18 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 07:23:18 -0800 Subject: Comment asml SNF 2010-10-25 09:23:56: Hotspots 10/25 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Nov 29 07:23:35 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 07:23:35 -0800 Subject: Comment asml SNF 2010-10-29 08:59:26: Starting hot spot cleaning Message-ID: To Archive From gsosa at snf.stanford.edu Mon Nov 29 07:23:41 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 07:23:41 -0800 Subject: Comment asml SNF 2010-10-29 09:24:34: hot spot cleared Message-ID: To Archive From gsosa at snf.stanford.edu Mon Nov 29 07:23:45 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 07:23:45 -0800 Subject: Comment asml SNF 2010-10-29 12:09:01: ASML Released Reservations 12:30-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Nov 29 07:23:49 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 07:23:49 -0800 Subject: Comment asml SNF 2010-11-01 09:47:32: Hotspots 11/1 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Nov 29 07:23:54 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 07:23:54 -0800 Subject: Comment asml SNF 2010-11-02 10:18:12: ASML Released Reservations 10:30-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Nov 29 07:23:59 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 07:23:59 -0800 Subject: Comment asml SNF 2010-11-03 08:53:13: ASML Released Reservations 9:00-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Nov 29 07:24:04 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 07:24:04 -0800 Subject: Comment asml SNF 2010-11-04 12:26:30: ASML Released Reservations 12:30-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Nov 29 07:24:09 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 07:24:09 -0800 Subject: Comment asml SNF 2010-11-05 09:00:07: ASML Released Reservations 9:00-13:00 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Nov 29 07:24:15 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 07:24:15 -0800 Subject: Comment asml SNF 2010-11-08 09:34:56: Hotspot 11/8 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Nov 29 07:24:19 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 07:24:19 -0800 Subject: Comment asml SNF 2010-11-09 09:05:28: ASML Released Reservations 9:30-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Nov 29 07:24:25 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 07:24:25 -0800 Subject: Comment asml SNF 2010-11-10 15:55:46: Day 1 of the PM is complete Message-ID: To Archive From gsosa at snf.stanford.edu Mon Nov 29 07:24:31 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 07:24:31 -0800 Subject: Comment asml SNF 2010-11-12 09:56:58: ASML update Message-ID: To Archive From gsosa at snf.stanford.edu Mon Nov 29 07:24:36 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 07:24:36 -0800 Subject: Comment asml SNF 2010-11-12 14:47:21: ASML UP Message-ID: To Archive From gsosa at snf.stanford.edu Mon Nov 29 07:24:43 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 07:24:43 -0800 Subject: Comment asml SNF 2010-11-15 09:03:15: Hotspot 11/15 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Nov 29 07:24:47 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 07:24:47 -0800 Subject: Comment asml SNF 2010-11-17 11:13:11: Hotspot 11/17 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Nov 29 07:24:52 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 07:24:52 -0800 Subject: Comment asml SNF 2010-11-17 12:16:55: ASML Released Reservations 12:30-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Nov 29 07:24:56 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 07:24:56 -0800 Subject: Comment asml SNF 2010-11-17 12:18:54: ASML Released Reservation 12:30 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Nov 29 09:15:17 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 09:15:17 -0800 Subject: Comment asml SNF 2010-11-29 09:15:16: 2 hotspots 11/29 Message-ID: 2 tiny hotspots on test wafer. Cleaned the Echuck and retested- OK. From lindaohara at snf.stanford.edu Tue Nov 30 11:50:30 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 30 Nov 2010 11:50:30 -0800 Subject: Comment asml SNF 2010-11-30 11:50:29: ASML Released Reservations 12:00-14:00 Message-ID: