Comment asml SNF 2010-11-01 09:47:32: Hotspots 11/1

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Nov 1 09:47:32 PDT 2010


2 hotspots on test wafer( 3 and 6 oclock). Cleaned E-chuck and retested.Retest OK. Daily quals completed. System ok to use.




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