Problem asml SNF 2010-11-01 11:35:38: lost track of reticle

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Mon Nov 1 11:35:39 PDT 2010


exposed one wf and when wanted to do the rest, system could not remember where the reticle is and asking for reinitilize the reticle loader.
Gary is coming to help.




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