Problem asml SNF 2010-11-01 11:35:38: lost track of reticle

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Nov 1 11:58:00 PDT 2010


Verified reticle location inside of tool. Reticle sitting safely in the gripper. re-initialized reticle handling and unloaded retilvne to smiff box. Did full startup- OK. User processed 3 wafers with same reticle with no problems.




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