Comment asml SNF 2010-11-08 09:34:56: Hotspot 11/8

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Nov 8 09:34:57 PST 2010


Hotspot on test wafer near 7 Oclock position. Cleaned the E-chuck with tooling. Retest OK. Daily qual completed




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