Problem asml SNF 2010-11-08 11:01:51: labmember ran wf with particles

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Nov 8 11:46:00 PST 2010


Exposed a hotspot wafer. There was a hotspot on the right side of the major flat. Cleaned the E-chuck with tooling and retested. Re-test came out good.




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