Shutdown asml SNF 2010-11-11 14:34:30: Reticle table tilt out of spec

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Thu Nov 11 14:34:32 PST 2010


Due to  reticle tilt being out of spec  the system will be down till tomorrw.
Joey will be back with correct instrument to adjust for that.
I keep telling you keep the back of your wafers clean.




More information about the asml-pcs mailing list