Shutdown asml SNF 2010-11-11 14:34:30: Reticle table tilt out of spec

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Thu Nov 11 14:34:32 PST 2010

Previous message: Comment asml SNF 2010-11-10 15:55:46: Day 1 of the PM is complete
Next message: Shutdown asml SNF 2010-11-11 14:34:30: Reticle table tilt out of spec
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Due to  reticle tilt being out of spec  the system will be down till tomorrw.
Joey will be back with correct instrument to adjust for that.
I keep telling you keep the back of your wafers clean.

Previous message: Comment asml SNF 2010-11-10 15:55:46: Day 1 of the PM is complete
Next message: Shutdown asml SNF 2010-11-11 14:34:30: Reticle table tilt out of spec
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the asml-pcs mailing list