Shutdown asml SNF 2010-11-11 14:37:43: Stepper Down

gsosa at gsosa at
Thu Nov 11 14:37:43 PST 2010

Red/Blue test indicated out of spec reticle tilt. Vendor needs to bring in special tooling to adjust reticle tilt.  Vendor will return tomorrow to dajust reticle tilt and to complete the PM.

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