Shutdown asml SNF 2010-11-11 14:34:30: Reticle table tilt out of spec
joho at snf.stanford.edu
joho at snf.stanford.edu
Fri Nov 12 11:20:04 PST 2010
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Shutdown asml SNF 2010-11-11 14:34:30: Reticle table tilt out of spec
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Reticle Table Tilts adjusted, and verified in spec
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Shutdown asml SNF 2010-11-11 14:34:30: Reticle table tilt out of spec
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Shutdown asml SNF 2010-11-11 14:37:43: Stepper Down
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