Shutdown asml SNF 2010-11-25 00:57:12: Wafer Handler won't move

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Sat Nov 27 12:05:34 PST 2010


Removed stranded wafer from system. Did full startup-OK. Cleaned the robot arm. visual inspection of users wafer- OK. Granite test-OK. Cycleled 20+ wafers through system with test run. All wafer handling functions OK. System OK to use.




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