From gsosa at snf.stanford.edu Fri Oct 1 09:56:28 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 1 Oct 2010 09:56:28 -0700 Subject: Comment asml SNF 2010-10-01 09:56:28: Hotspots 10/1/10 Message-ID: Hotspots on test wafer at 9 Oclock and 1 Oclock. Cleaned the E-chuck with tooling. Retest came out OK. From lindaohara at snf.stanford.edu Fri Oct 1 10:15:44 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 1 Oct 2010 10:15:44 -0700 Subject: Comment asml SNF 2010-10-01 10:15:43: ASML Released Reservations 11:00-14:00 Message-ID: From gsosa at snf.stanford.edu Mon Oct 4 06:55:11 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Oct 2010 06:55:11 -0700 Subject: Comment asml SNF 2010-08-20 09:03:44: Hotspot 8/20 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Oct 4 06:55:16 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Oct 2010 06:55:16 -0700 Subject: Comment asml SNF 2010-08-23 08:54:10: Hotspots 8/23 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Oct 4 06:55:21 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Oct 2010 06:55:21 -0700 Subject: Comment asml SNF 2010-08-27 10:44:33: Hotspot 8/27 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Oct 4 06:55:25 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Oct 2010 06:55:25 -0700 Subject: Comment asml SNF 2010-09-02 15:16:45: Hotspot 9/2 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Oct 4 06:55:30 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Oct 2010 06:55:30 -0700 Subject: Comment asml SNF 2010-09-08 08:21:30: ASML MPM Day 1 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Oct 4 06:55:35 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Oct 2010 06:55:35 -0700 Subject: Comment asml SNF 2010-09-08 09:43:11: Hotspot Message-ID: To Archive From gsosa at snf.stanford.edu Mon Oct 4 06:55:40 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Oct 2010 06:55:40 -0700 Subject: Comment asml SNF 2010-09-08 15:05:24: ASML MPM Day1 Completed Message-ID: To Archive From gsosa at snf.stanford.edu Mon Oct 4 06:55:45 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Oct 2010 06:55:45 -0700 Subject: Comment asml SNF 2010-09-09 08:22:41: ASML MPM Day 2 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Oct 4 06:55:49 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Oct 2010 06:55:49 -0700 Subject: Comment asml SNF 2010-09-09 11:38:20: Hotspot Message-ID: To Archive From gsosa at snf.stanford.edu Mon Oct 4 06:55:55 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Oct 2010 06:55:55 -0700 Subject: Comment asml SNF 2010-09-09 11:38:41: ASML MPM Day 2 Completed Message-ID: To Archive From gsosa at snf.stanford.edu Mon Oct 4 06:56:00 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Oct 2010 06:56:00 -0700 Subject: Comment asml SNF 2010-09-14 11:06:19: Hotspots 9/14 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Oct 4 06:56:05 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Oct 2010 06:56:05 -0700 Subject: Comment asml SNF 2010-09-15 10:58:41: ASML Released Reservations 11:00-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Oct 4 06:56:11 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Oct 2010 06:56:11 -0700 Subject: Comment asml SNF 2010-09-16 08:47:18: 3 Reticles left in SNF Reticle Pod Message-ID: To Archive From gsosa at snf.stanford.edu Mon Oct 4 06:56:15 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Oct 2010 06:56:15 -0700 Subject: Comment asml SNF 2010-09-20 09:48:53: Hotspots 09/20 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Oct 4 06:56:22 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Oct 2010 06:56:22 -0700 Subject: Comment asml SNF 2010-09-21 07:37:34: ASML 8" Demo Message-ID: To Archive From gsosa at snf.stanford.edu Mon Oct 4 06:56:27 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Oct 2010 06:56:27 -0700 Subject: Comment asml SNF 2010-09-24 15:26:38: ASML Up for 4" Message-ID: To Archive From gsosa at snf.stanford.edu Mon Oct 4 06:56:32 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Oct 2010 06:56:32 -0700 Subject: Comment asml SNF 2010-09-27 09:36:07: Hotspots 09/27 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Oct 4 06:56:37 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Oct 2010 06:56:37 -0700 Subject: Comment asml SNF 2010-09-28 08:58:06: ASML DEMO Message-ID: To Archive From gsosa at snf.stanford.edu Mon Oct 4 06:56:42 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Oct 2010 06:56:42 -0700 Subject: Comment asml SNF 2010-09-28 11:28:21: ASML Released Reservations 12:00-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Oct 4 06:57:13 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Oct 2010 06:57:13 -0700 Subject: Comment asml SNF 2010-09-29 11:57:19: ASML Released Reservations 12:00-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Oct 4 06:57:18 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Oct 2010 06:57:18 -0700 Subject: Comment asml SNF 2010-09-30 10:46:03: ASML Released Reservations 11:00-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Oct 4 06:57:26 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Oct 2010 06:57:26 -0700 Subject: Comment asml SNF 2010-10-01 10:15:43: ASML Released Reservations 11:00-14:00 Message-ID: To Archive From lindaohara at snf.stanford.edu Wed Oct 6 11:00:19 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 6 Oct 2010 11:00:19 -0700 Subject: Comment asml SNF 2010-10-06 11:00:19: ASML Released Reservations 11:00-14:00 Message-ID: From jwpchen at snf.stanford.edu Wed Oct 6 20:42:40 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Wed, 6 Oct 2010 20:42:40 -0700 Subject: Shutdown asml SNF 2010-10-06 20:42:39: wafers in machine Message-ID: wafer #3 of 7 errored when e-chuck unloading, machine wants fast startup but 3 wafers still inside From joho at snf.stanford.edu Thu Oct 7 09:39:56 2010 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Thu, 7 Oct 2010 09:39:56 -0700 Subject: Comment asml SNF 2010-10-07 09:39:54: System up Message-ID: Removed wafer from the system, and qualified with no issues. System is back up for lab members. From joho at snf.stanford.edu Thu Oct 7 09:40:07 2010 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Thu, 7 Oct 2010 09:40:07 -0700 Subject: Shutdown asml SNF 2010-10-06 20:42:39: wafers in machine Message-ID: From gsosa at snf.stanford.edu Fri Oct 8 08:46:35 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 8 Oct 2010 08:46:35 -0700 Subject: Comment asml SNF 2010-10-08 08:46:34: Hotspots 10/8 Message-ID: 4 hotspots on test wafer. Cleaned E-chuck with tooling. Re-test came out OK. From gsosa at snf.stanford.edu Fri Oct 8 08:48:09 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 8 Oct 2010 08:48:09 -0700 Subject: Comment asml SNF 2010-10-08 08:48:08: Reservations released 10/8 Message-ID: Todays ASML reservation time released. Tool is open for users. From rik at snf.stanford.edu Mon Oct 11 19:25:02 2010 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Mon, 11 Oct 2010 19:25:02 -0700 Subject: Shutdown asml SNF 2010-10-11 19:25:01: Software froze Message-ID: Was running a test queue for wafer numbering and the software froze. Stop button not working. Reticles are still in the machine, but got wafers out. COMBI reticle is in the SNF box, which is inside the machine. From lindaohara at snf.stanford.edu Tue Oct 12 08:08:47 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 12 Oct 2010 08:08:47 -0700 Subject: Shutdown asml SNF 2010-10-11 19:25:01: Software froze Message-ID: Joey Ho rebooted system. system up From lindaohara at snf.stanford.edu Tue Oct 12 08:09:12 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 12 Oct 2010 08:09:12 -0700 Subject: Comment asml SNF 2010-10-12 08:09:12: 6" Conversion Message-ID: From lindaohara at snf.stanford.edu Tue Oct 12 13:57:36 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 12 Oct 2010 13:57:36 -0700 Subject: Comment asml SNF 2010-10-12 13:57:36: 6" Conversion Completed Message-ID: Also Joey Ho did Lamp Change. System up for 4" From joho at snf.stanford.edu Tue Oct 12 13:57:48 2010 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Tue, 12 Oct 2010 13:57:48 -0700 Subject: Comment asml SNF 2010-10-12 13:57:48: Released ASML time 1400-1600 Message-ID: Completed 6in demo, and daily quals. Releasing the remaining time to lab members. From lindaohara at snf.stanford.edu Tue Oct 12 13:59:06 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 12 Oct 2010 13:59:06 -0700 Subject: Comment asml SNF 2010-10-12 13:59:06: ASML Released Reservations 14:00-16:00 Message-ID: From kibumlee at snf.stanford.edu Tue Oct 12 21:11:45 2010 From: kibumlee at snf.stanford.edu (kibumlee at snf.stanford.edu) Date: Tue, 12 Oct 2010 21:11:45 -0700 Subject: Shutdown asml SNF 2010-10-12 21:11:45: Robot arm didn't pick up the wafer. Message-ID: I successfully exposed several wafers. After that I tried double exposure to one of my wafer. First exposure was successful and I exchanged the cassette in the input box and output box. The robot arm tried to pick up the wafer but it couldn't. After that the machine keep thinking there is wafer inside the machine although the only wafer is still in the input cassette. It refuses to be rebooted. From joho at snf.stanford.edu Wed Oct 13 07:54:54 2010 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Wed, 13 Oct 2010 07:54:54 -0700 Subject: Shutdown asml SNF 2010-10-12 21:11:45: Robot arm didn't pick up the wafer. Message-ID: cleared wafer from input port, starting QPM From joho at snf.stanford.edu Wed Oct 13 16:08:10 2010 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Wed, 13 Oct 2010 16:08:10 -0700 Subject: Comment asml SNF 2010-10-13 16:08:08: post pm check found a hotspot Message-ID: hot spot on chuck From joho at snf.stanford.edu Wed Oct 13 16:37:31 2010 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Wed, 13 Oct 2010 16:37:31 -0700 Subject: Comment asml SNF 2010-10-13 16:37:30: system ok for lab members now Message-ID: cleaned hot spot, verified ok now From zzp at snf.stanford.edu Wed Oct 13 18:47:15 2010 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Wed, 13 Oct 2010 18:47:15 -0700 Subject: Shutdown asml SNF 2010-10-13 18:47:15: machine jammed at opening a job file Message-ID: For some reason my job file in ASML was outdated and i had to copy the new copy from a disk. The machine jammed at opening the new file, reporting it is corrupted. From joho at snf.stanford.edu Wed Oct 13 20:06:52 2010 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Wed, 13 Oct 2010 20:06:52 -0700 Subject: Comment asml SNF 2010-10-13 20:06:52: found system at unix prompt Message-ID: investigating the job issue From joho at snf.stanford.edu Thu Oct 14 16:33:08 2010 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Thu, 14 Oct 2010 16:33:08 -0700 Subject: Comment asml SNF 2010-10-14 16:33:07: system down till approx 1800 hours Message-ID: focus is being setup post reticle table tilts adjustment, eta till up is 1800 hours From joho at snf.stanford.edu Thu Oct 14 18:24:34 2010 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Thu, 14 Oct 2010 18:24:34 -0700 Subject: Shutdown asml SNF 2010-10-13 18:47:15: machine jammed at opening a job file Message-ID: updated all patches on the tool, removed the corrupt customer files. verified that all asml jobs run with no issues, as well as other lab member jobs. From joho at snf.stanford.edu Thu Oct 14 18:25:10 2010 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Thu, 14 Oct 2010 18:25:10 -0700 Subject: Comment asml SNF 2010-10-14 18:25:09: system open to lab members Message-ID: system is okay for wafer processing now. verified focus is good. From joho at snf.stanford.edu Fri Oct 15 14:51:26 2010 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Fri, 15 Oct 2010 14:51:26 -0700 Subject: Comment asml SNF 2010-10-15 14:51:25: asml up Message-ID: backside align calibrations are done. returning system to lab members. From gsosa at snf.stanford.edu Mon Oct 18 10:10:21 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 18 Oct 2010 10:10:21 -0700 Subject: Comment asml SNF 2010-10-18 10:10:18: Hotspots 10/18 Message-ID: 2 hotspots on test wafer. Cleaned the E-chuck and retested. OK now. From gsosa at snf.stanford.edu Mon Oct 18 10:43:17 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 18 Oct 2010 10:43:17 -0700 Subject: Problem asml SNF 2010-03-24 22:45:27: SRD leaving water on wafers Message-ID: From calarrudo at snf.stanford.edu Mon Oct 18 23:15:18 2010 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Mon, 18 Oct 2010 23:15:18 -0700 Subject: Problem asml SNF 2010-10-18 23:15:17: Message-ID: cannot clear the screen to exit out of program. From calarrudo at snf.stanford.edu Mon Oct 18 23:45:08 2010 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Mon, 18 Oct 2010 23:45:08 -0700 Subject: Shutdown asml SNF 2010-10-18 23:45:08: Message-ID: cannot exit screen with alignment details. From gsosa at snf.stanford.edu Tue Oct 19 07:35:38 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 19 Oct 2010 07:35:38 -0700 Subject: Shutdown asml SNF 2010-10-18 23:45:08: Message-ID: Reboot application software and full start-up From gsosa at snf.stanford.edu Tue Oct 19 07:35:46 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 19 Oct 2010 07:35:46 -0700 Subject: Problem asml SNF 2010-10-18 23:15:17: Message-ID: Reboot application software and full start-up From lindaohara at snf.stanford.edu Tue Oct 19 12:01:41 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 19 Oct 2010 12:01:41 -0700 Subject: Comment asml SNF 2010-10-19 12:01:41: ASML Released Reservations 12:00-14:00 Message-ID: From mnakamura at snf.stanford.edu Tue Oct 19 15:20:26 2010 From: mnakamura at snf.stanford.edu (mnakamura at snf.stanford.edu) Date: Tue, 19 Oct 2010 15:20:26 -0700 Subject: Comment asml SNF 2010-10-19 15:20:24: patch back-out/install on disk0 Message-ID: on disk0, backed out patches 38c-72c, installed 901b, and tested IQC From wanglele501 at snf.stanford.edu Tue Oct 19 22:50:47 2010 From: wanglele501 at snf.stanford.edu (wanglele501 at snf.stanford.edu) Date: Tue, 19 Oct 2010 22:50:47 -0700 Subject: Problem asml SNF 2010-10-19 22:50:46: could not exit to main screen Message-ID: When returning to main, screen does not responding. From lindaohara at snf.stanford.edu Wed Oct 20 08:49:35 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 20 Oct 2010 08:49:35 -0700 Subject: Comment asml SNF 2010-10-20 08:49:34: Hotspot at 7 o'clock position Message-ID: Gary will clean the E-Chuck and then retest From mahnaz at snf.stanford.edu Wed Oct 20 09:50:25 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 20 Oct 2010 09:50:25 -0700 Subject: Comment asml SNF 2010-10-19 12:01:41: ASML Released Reservations 12:00-14:00 Message-ID: From mahnaz at snf.stanford.edu Wed Oct 20 09:50:40 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 20 Oct 2010 09:50:40 -0700 Subject: Comment asml SNF 2010-10-14 16:33:07: system down till approx 1800 hours Message-ID: From mahnaz at snf.stanford.edu Wed Oct 20 09:51:03 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 20 Oct 2010 09:51:03 -0700 Subject: Comment asml SNF 2010-10-12 13:59:06: ASML Released Reservations 14:00-16:00 Message-ID: From mahnaz at snf.stanford.edu Wed Oct 20 09:51:09 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 20 Oct 2010 09:51:09 -0700 Subject: Comment asml SNF 2010-10-12 13:57:48: Released ASML time 1400-1600 Message-ID: From mahnaz at snf.stanford.edu Wed Oct 20 09:51:17 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 20 Oct 2010 09:51:17 -0700 Subject: Comment asml SNF 2010-10-08 08:48:08: Reservations released 10/8 Message-ID: From mahnaz at snf.stanford.edu Wed Oct 20 09:51:26 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 20 Oct 2010 09:51:26 -0700 Subject: Comment asml SNF 2010-10-07 09:39:54: System up Message-ID: From mahnaz at snf.stanford.edu Wed Oct 20 09:51:35 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 20 Oct 2010 09:51:35 -0700 Subject: Comment asml SNF 2010-10-06 11:00:19: ASML Released Reservations 11:00-14:00 Message-ID: From mahnaz at snf.stanford.edu Wed Oct 20 09:51:46 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 20 Oct 2010 09:51:46 -0700 Subject: Comment asml SNF 2010-10-13 16:08:08: post pm check found a hotspot Message-ID: From mahnaz at snf.stanford.edu Wed Oct 20 09:51:54 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 20 Oct 2010 09:51:54 -0700 Subject: Comment asml SNF 2010-10-14 18:25:09: system open to lab members Message-ID: From lindaohara at snf.stanford.edu Wed Oct 20 10:41:45 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 20 Oct 2010 10:41:45 -0700 Subject: Comment asml SNF 2010-10-20 10:41:44: Hotspot Ck Message-ID: Gary cleaned E-Chuck. Hotspot ck, no hotspots. From lindaohara at snf.stanford.edu Wed Oct 20 11:54:24 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 20 Oct 2010 11:54:24 -0700 Subject: Comment asml SNF 2010-10-20 11:54:23: ASML Released Reservations 12:00-14:00 Message-ID: From lindaohara at snf.stanford.edu Thu Oct 21 09:15:29 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 21 Oct 2010 09:15:29 -0700 Subject: Comment asml SNF 2010-10-21 09:15:29: ASML Released Reservations 9:30-14:00 Message-ID: From mahnaz at snf.stanford.edu Thu Oct 21 10:25:30 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 21 Oct 2010 10:25:30 -0700 Subject: Problem asml SNF 2010-04-09 17:15:12: ASML Software Bug(?) Message-ID: Without using the batch streaming, the problem still exists. We don't know an exact scenario to cause the problem. So, an user should check a batch definition report when they name images with similar names and those images use different reticles. From mahnaz at snf.stanford.edu Thu Oct 21 10:26:21 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 21 Oct 2010 10:26:21 -0700 Subject: Problem asml SNF 2010-10-19 22:50:46: could not exit to main screen Message-ID: Fse cleared the problem. not sure what has happened or why. From lindaohara at snf.stanford.edu Fri Oct 22 11:15:27 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 22 Oct 2010 11:15:27 -0700 Subject: Comment asml SNF 2010-10-22 11:15:25: Hotspot Ck Message-ID: Hotspot found at 2 o'clock position. Gary cleaned E-Chuck. retest and no hotspot From lindaohara at snf.stanford.edu Fri Oct 22 11:16:00 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 22 Oct 2010 11:16:00 -0700 Subject: Comment asml SNF 2010-10-22 11:15:59: ASML Released Reservations 12:00-14:00 Message-ID: From gsosa at snf.stanford.edu Mon Oct 25 09:23:56 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 25 Oct 2010 09:23:56 -0700 Subject: Comment asml SNF 2010-10-25 09:23:56: Hotspots 10/25 Message-ID: 3 hotspots on test wafer. Cleaned E-chuck and re-tested. Re-test OK. Completed daily qual. All OK. System ready to use. From lindaohara at snf.stanford.edu Tue Oct 26 10:02:25 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 26 Oct 2010 10:02:25 -0700 Subject: Comment asml SNF 2010-10-26 10:02:24: ASML Released Reservations 10:00-14:00 Message-ID: From gsosa at snf.stanford.edu Wed Oct 27 08:01:52 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 27 Oct 2010 08:01:52 -0700 Subject: Comment asml SNF 2010-10-27 08:01:52: ASML Released Reservations 10/27 Message-ID: ASML reservations for today are released. Tool is available for use. Daily qual performed- All OK From mahnaz at snf.stanford.edu Wed Oct 27 08:28:36 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 27 Oct 2010 08:28:36 -0700 Subject: Comment asml SNF 2010-10-27 08:28:35: 6" Message-ID: Per a labmember request the system will switch to 6" on Thursday 28th. The switch will take place during ASML time. Any one interested in running 6" and can have wafers ready please come by. From lindaohara at snf.stanford.edu Thu Oct 28 07:43:29 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 28 Oct 2010 07:43:29 -0700 Subject: Comment asml SNF 2010-10-28 07:43:28: Start 6" Conversion Message-ID: From joho at snf.stanford.edu Thu Oct 28 07:56:36 2010 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Thu, 28 Oct 2010 07:56:36 -0700 Subject: Comment asml SNF 2010-10-28 07:56:35: Starting 6in conversion Message-ID: Daily Quals completed. Starting 6in conversion. From joho at snf.stanford.edu Thu Oct 28 12:13:56 2010 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Thu, 28 Oct 2010 12:13:56 -0700 Subject: Comment asml SNF 2010-10-28 12:13:56: asml back to 4 inch Message-ID: completed the 6in conversion. the system is configured and qualified for 4inch wafers now. From lindaohara at snf.stanford.edu Thu Oct 28 12:15:08 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 28 Oct 2010 12:15:08 -0700 Subject: Comment asml SNF 2010-10-28 12:15:08: ASML Released Reservations 12:30-14:00 Message-ID: From gsosa at snf.stanford.edu Thu Oct 28 15:34:26 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 28 Oct 2010 15:34:26 -0700 Subject: Problem asml SNF 2010-10-28 15:34:25: Possible hotspot 10/28 Message-ID: User reported a hotspot on his test wafer. Will shoot our hotspot test and clean the e-chuck , if needed From mahnaz at snf.stanford.edu Thu Oct 28 15:39:20 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 28 Oct 2010 15:39:20 -0700 Subject: Comment asml SNF 2010-10-20 11:54:23: ASML Released Reservations 12:00-14:00 Message-ID: From mahnaz at snf.stanford.edu Thu Oct 28 15:39:34 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 28 Oct 2010 15:39:34 -0700 Subject: Comment asml SNF 2010-10-13 16:37:30: system ok for lab members now Message-ID: From mahnaz at snf.stanford.edu Thu Oct 28 15:39:38 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 28 Oct 2010 15:39:38 -0700 Subject: Comment asml SNF 2010-10-22 11:15:59: ASML Released Reservations 12:00-14:00 Message-ID: From mahnaz at snf.stanford.edu Thu Oct 28 15:39:45 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 28 Oct 2010 15:39:45 -0700 Subject: Comment asml SNF 2010-10-26 10:02:24: ASML Released Reservations 10:00-14:00 Message-ID: From mahnaz at snf.stanford.edu Thu Oct 28 15:39:51 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 28 Oct 2010 15:39:51 -0700 Subject: Comment asml SNF 2010-10-27 08:01:52: ASML Released Reservations 10/27 Message-ID: From mahnaz at snf.stanford.edu Thu Oct 28 15:40:00 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 28 Oct 2010 15:40:00 -0700 Subject: Comment asml SNF 2010-10-28 12:15:08: ASML Released Reservations 12:30-14:00 Message-ID: From mahnaz at snf.stanford.edu Thu Oct 28 15:40:32 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 28 Oct 2010 15:40:32 -0700 Subject: Comment asml SNF 2010-10-21 09:15:29: ASML Released Reservations 9:30-14:00 Message-ID: From gsosa at snf.stanford.edu Thu Oct 28 16:17:09 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 28 Oct 2010 16:17:09 -0700 Subject: Problem asml SNF 2010-10-28 15:34:25: Possible hotspot 10/28 Message-ID: Exposed a standard hotspot test wafer. Test wafer looked good. Did not need to clean the E-chuck. User will investigate his process and optimize. Stepper OK to use. From lindaohara at snf.stanford.edu Fri Oct 29 08:07:14 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 29 Oct 2010 08:07:14 -0700 Subject: Problem asml SNF 2010-10-29 08:07:13: Hotspot Message-ID: Hotspot at top center, Joey from ASML will be here to clean E-Chuck From joho at snf.stanford.edu Fri Oct 29 08:59:26 2010 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Fri, 29 Oct 2010 08:59:26 -0700 Subject: Comment asml SNF 2010-10-29 08:59:26: Starting hot spot cleaning Message-ID: From joho at snf.stanford.edu Fri Oct 29 09:24:34 2010 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Fri, 29 Oct 2010 09:24:34 -0700 Subject: Comment asml SNF 2010-10-29 09:24:34: hot spot cleared Message-ID: cleaned the exposure chuck, verified the hot spot is cleared. From lindaohara at snf.stanford.edu Fri Oct 29 11:22:17 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 29 Oct 2010 11:22:17 -0700 Subject: Problem asml SNF 2010-10-29 08:07:13: Hotspot Message-ID: leaned the exposure chuck, verified the hot spot is cleared. Joey ASML CSE From lindaohara at snf.stanford.edu Fri Oct 29 12:09:02 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 29 Oct 2010 12:09:02 -0700 Subject: Comment asml SNF 2010-10-29 12:09:01: ASML Released Reservations 12:30-14:00 Message-ID: