Comment asml SNF 2010-10-01 09:56:28: Hotspots 10/1/10

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Oct 1 09:56:28 PDT 2010


Hotspots on test wafer at 9 Oclock and 1 Oclock. Cleaned the E-chuck with tooling. Retest came out OK.




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