Shutdown asml SNF 2010-10-11 19:25:01: Software froze

rik at snf.stanford.edu rik at snf.stanford.edu
Mon Oct 11 19:25:02 PDT 2010


Was running a test queue for wafer numbering and the software froze. Stop button not working. Reticles are still in the machine, but got wafers out. COMBI reticle is in the SNF box, which is inside the machine. 




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