Comment asml SNF 2010-10-13 16:08:08: post pm check found a hotspot
joho at snf.stanford.edu
joho at snf.stanford.edu
Wed Oct 13 16:08:10 PDT 2010
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Shutdown asml SNF 2010-10-12 21:11:45: Robot arm didn't pick up the wafer.
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Comment asml SNF 2010-10-13 16:08:08: post pm check found a hotspot
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hot spot on chuck
Previous message:
Shutdown asml SNF 2010-10-12 21:11:45: Robot arm didn't pick up the wafer.
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Comment asml SNF 2010-10-13 16:08:08: post pm check found a hotspot
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