Problem asml SNF 2010-04-09 17:15:12: ASML Software Bug(?)

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Thu Oct 21 10:25:30 PDT 2010


Without using the batch streaming, the problem still exists. We don't know an exact scenario to cause the problem. So, an user should check a  batch definition report when they name images with similar names and those images use different reticles.




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