Comment asml SNF 2010-10-25 09:23:56: Hotspots 10/25

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Oct 25 09:23:56 PDT 2010


3 hotspots on test wafer. Cleaned E-chuck and re-tested. Re-test OK. Completed daily qual. All OK. System ready to use.




More information about the asml-pcs mailing list