Problem asml SNF 2010-10-28 15:34:25: Possible hotspot 10/28

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Oct 28 16:17:09 PDT 2010


Exposed a standard hotspot test wafer. Test wafer looked good. Did not need to clean the E-chuck. User will investigate his process and optimize. Stepper OK to use. 




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