From lindaohara at snf.stanford.edu Thu Sep 2 10:07:56 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 2 Sep 2010 10:07:56 -0700 Subject: Comment asml SNF 2010-09-02 10:07:56: ASML Released Reservations 10:30-14:00 Message-ID: From mahnaz at snf.stanford.edu Thu Sep 2 10:15:16 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 2 Sep 2010 10:15:16 -0700 Subject: Problem asml SNF 2010-08-31 22:23:47: algnment shit about 200-300nm Message-ID: Talking to Cursive, we realized that the shift is due to his SOI substrate. From mahnaz at snf.stanford.edu Thu Sep 2 10:15:32 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 2 Sep 2010 10:15:32 -0700 Subject: Comment asml SNF 2010-08-27 10:46:27: ASML Released Reservations 11:30-14:00 Message-ID: From mahnaz at snf.stanford.edu Thu Sep 2 10:16:15 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 2 Sep 2010 10:16:15 -0700 Subject: Comment asml SNF 2010-08-24 09:26:53: ASML Released Reservations 9:30-14:00 Message-ID: From mahnaz at snf.stanford.edu Thu Sep 2 10:16:44 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 2 Sep 2010 10:16:44 -0700 Subject: Comment asml SNF 2010-08-25 08:38:40: ASML Released Reservations until 10:00 Message-ID: done From mahnaz at snf.stanford.edu Thu Sep 2 10:18:30 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 2 Sep 2010 10:18:30 -0700 Subject: Comment asml SNF 2010-08-25 08:44:27: ASML Released Reservations 9:00-14:00 Message-ID: done From mahnaz at snf.stanford.edu Thu Sep 2 10:18:37 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 2 Sep 2010 10:18:37 -0700 Subject: Comment asml SNF 2010-08-26 09:16:54: ASML Released Reservations until 11:00 Message-ID: From mahnaz at snf.stanford.edu Thu Sep 2 10:18:41 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 2 Sep 2010 10:18:41 -0700 Subject: Comment asml SNF 2010-08-26 13:21:54: ASML Released Reservation until 14:00 Message-ID: From mahnaz at snf.stanford.edu Thu Sep 2 10:18:52 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 2 Sep 2010 10:18:52 -0700 Subject: Comment asml SNF 2010-08-17 11:42:22: ASML Released Reservations 12:00-14:00 Message-ID: From mahnaz at snf.stanford.edu Thu Sep 2 10:18:57 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 2 Sep 2010 10:18:57 -0700 Subject: Comment asml SNF 2010-08-18 13:23:11: ASML Released Reservations 13:30-14:00 Message-ID: From mahnaz at snf.stanford.edu Thu Sep 2 10:19:02 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 2 Sep 2010 10:19:02 -0700 Subject: Comment asml SNF 2010-08-19 08:49:25: ASML Released Reservations 9:00-10:00 Message-ID: From mahnaz at snf.stanford.edu Thu Sep 2 10:19:07 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 2 Sep 2010 10:19:07 -0700 Subject: Comment asml SNF 2010-08-19 11:21:31: ASML Released Reservations 11:30-14:00 Message-ID: From mahnaz at snf.stanford.edu Thu Sep 2 10:19:13 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 2 Sep 2010 10:19:13 -0700 Subject: Comment asml SNF 2010-08-20 09:39:02: ASML Released Reservations 10:00-14:00 Message-ID: From lindaohara at snf.stanford.edu Thu Sep 2 15:16:45 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 2 Sep 2010 15:16:45 -0700 Subject: Comment asml SNF 2010-09-02 15:16:45: Hotspot 9/2 Message-ID: Hotspot at 6 o'clock. Gary cleaned E-Chuck. Hotspot check ok, no hotspots From lindaohara at snf.stanford.edu Fri Sep 3 11:43:25 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 3 Sep 2010 11:43:25 -0700 Subject: Comment asml SNF 2010-09-03 11:43:24: ASML Released Reservations 12:00-14-:00 Message-ID: From daesung at snf.stanford.edu Mon Sep 6 22:50:42 2010 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Mon, 6 Sep 2010 22:50:42 -0700 Subject: Problem asml SNF 2010-09-06 22:50:41: Input wafer cover detached Message-ID: From lindaohara at snf.stanford.edu Tue Sep 7 11:21:13 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 7 Sep 2010 11:21:13 -0700 Subject: Comment asml SNF 2010-09-07 11:21:12: ASML Released Reservations 11:30-14:00 Message-ID: From lindaohara at snf.stanford.edu Wed Sep 8 08:21:31 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 8 Sep 2010 08:21:31 -0700 Subject: Comment asml SNF 2010-09-08 08:21:30: ASML MPM Day 1 Message-ID: From lindaohara at snf.stanford.edu Wed Sep 8 09:43:12 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 8 Sep 2010 09:43:12 -0700 Subject: Comment asml SNF 2010-09-08 09:43:11: Hotspot Message-ID: Hotspot at center 9 o'clock, Saeed cleaned E-Chuck, recheck, no hotspots From lindaohara at snf.stanford.edu Wed Sep 8 15:05:26 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 8 Sep 2010 15:05:26 -0700 Subject: Comment asml SNF 2010-09-08 15:05:24: ASML MPM Day1 Completed Message-ID: From lindaohara at snf.stanford.edu Thu Sep 9 08:22:41 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 9 Sep 2010 08:22:41 -0700 Subject: Comment asml SNF 2010-09-09 08:22:41: ASML MPM Day 2 Message-ID: From lindaohara at snf.stanford.edu Thu Sep 9 11:38:22 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 9 Sep 2010 11:38:22 -0700 Subject: Comment asml SNF 2010-09-09 11:38:20: Hotspot Message-ID: Hotspot at 6 o'clock, Saeed cleaned E-Chuck, hotspot ck ok From lindaohara at snf.stanford.edu Thu Sep 9 11:38:43 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 9 Sep 2010 11:38:43 -0700 Subject: Comment asml SNF 2010-09-09 11:38:41: ASML MPM Day 2 Completed Message-ID: From lindaohara at snf.stanford.edu Thu Sep 9 11:39:05 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 9 Sep 2010 11:39:05 -0700 Subject: Comment asml SNF 2010-09-09 11:39:02: ASML Released Reservations 13:00-16:00 Message-ID: From lindaohara at snf.stanford.edu Fri Sep 10 10:55:14 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 10 Sep 2010 10:55:14 -0700 Subject: Comment asml SNF 2010-09-10 10:55:13: ASML Released Reservations 11:00-13:00 Message-ID: From gsosa at snf.stanford.edu Tue Sep 14 11:06:20 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 14 Sep 2010 11:06:20 -0700 Subject: Comment asml SNF 2010-09-14 11:06:19: Hotspots 9/14 Message-ID: 4 hotspots on test wafer. Cleaned the E-chuck with tooling and retested. Hotspot re-test OK. From lindaohara at snf.stanford.edu Tue Sep 14 13:22:06 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 14 Sep 2010 13:22:06 -0700 Subject: Comment asml SNF 2010-09-14 13:22:05: ASML Released Reservation 13:30-!4-00 Message-ID: From mahnaz at snf.stanford.edu Wed Sep 15 07:29:16 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 15 Sep 2010 07:29:16 -0700 Subject: Comment asml SNF 2010-09-09 11:39:02: ASML Released Reservations 13:00-16:00 Message-ID: done From mahnaz at snf.stanford.edu Wed Sep 15 07:29:22 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 15 Sep 2010 07:29:22 -0700 Subject: Comment asml SNF 2010-09-10 10:55:13: ASML Released Reservations 11:00-13:00 Message-ID: From mahnaz at snf.stanford.edu Wed Sep 15 07:29:27 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 15 Sep 2010 07:29:27 -0700 Subject: Comment asml SNF 2010-09-14 13:22:05: ASML Released Reservation 13:30-!4-00 Message-ID: From mahnaz at snf.stanford.edu Wed Sep 15 07:29:35 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 15 Sep 2010 07:29:35 -0700 Subject: Comment asml SNF 2010-08-31 09:58:42: ASML Released Reservations 10:30-14:00 Message-ID: From mahnaz at snf.stanford.edu Wed Sep 15 07:29:40 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 15 Sep 2010 07:29:40 -0700 Subject: Comment asml SNF 2010-09-02 10:07:56: ASML Released Reservations 10:30-14:00 Message-ID: From mahnaz at snf.stanford.edu Wed Sep 15 07:29:53 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 15 Sep 2010 07:29:53 -0700 Subject: Comment asml SNF 2010-09-03 11:43:24: ASML Released Reservations 12:00-14-:00 Message-ID: From mahnaz at snf.stanford.edu Wed Sep 15 07:29:58 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 15 Sep 2010 07:29:58 -0700 Subject: Comment asml SNF 2010-09-07 11:21:12: ASML Released Reservations 11:30-14:00 Message-ID: From mahnaz at snf.stanford.edu Wed Sep 15 10:01:13 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 15 Sep 2010 10:01:13 -0700 Subject: Problem asml SNF 2010-09-06 22:50:41: Input wafer cover detached Message-ID: Has been fixed while back. From mahnaz at snf.stanford.edu Wed Sep 15 10:02:11 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 15 Sep 2010 10:02:11 -0700 Subject: Problem asml SNF 2010-08-23 10:44:03: energy sensor Temp warning Message-ID: ASML is aware of this. amd is no harm to exposure From lindaohara at snf.stanford.edu Wed Sep 15 10:58:42 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 15 Sep 2010 10:58:42 -0700 Subject: Comment asml SNF 2010-09-15 10:58:41: ASML Released Reservations 11:00-14:00 Message-ID: From lindaohara at snf.stanford.edu Thu Sep 16 08:47:19 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 16 Sep 2010 08:47:19 -0700 Subject: Comment asml SNF 2010-09-16 08:47:18: 3 Reticles left in SNF Reticle Pod Message-ID: From mahnaz at snf.stanford.edu Fri Sep 17 10:27:57 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 17 Sep 2010 10:27:57 -0700 Subject: Problem asml SNF 2010-09-17 10:27:56: two hot spot Message-ID: Gary is busy with tracks so we will clean it when we get around it. This daily chore is becoming very time consuming. From gsosa at snf.stanford.edu Fri Sep 17 13:34:29 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 17 Sep 2010 13:34:29 -0700 Subject: Problem asml SNF 2010-09-17 10:27:56: two hot spot Message-ID: Cleaned E-chuck with tooling and retested. Re-test came out good. From kibumlee at snf.stanford.edu Sun Sep 19 15:22:04 2010 From: kibumlee at snf.stanford.edu (kibumlee at snf.stanford.edu) Date: Sun, 19 Sep 2010 15:22:04 -0700 Subject: Shutdown asml SNF 2010-09-19 15:22:04: Wafer got stuck Message-ID: wafer got stuck in P-Chuck and machine asked me to do fast startup. I noticed later that the wafer was broken accidently while in input cassette. From gsosa at snf.stanford.edu Mon Sep 20 09:47:34 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 20 Sep 2010 09:47:34 -0700 Subject: Shutdown asml SNF 2010-09-19 15:22:04: Wafer got stuck Message-ID: Stranded wafer had a stress crack on right side. The incomplete wafer created a vacuum error at the pre-aligner chuck. Retrieved the stranded wafer. Cleared wafer and did complete full startup. Tested wafer transfer while doing daily qual. All OK. From gsosa at snf.stanford.edu Mon Sep 20 09:48:53 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 20 Sep 2010 09:48:53 -0700 Subject: Comment asml SNF 2010-09-20 09:48:53: Hotspots 09/20 Message-ID: 2 hotspots on test wafer at 6 oclock and 3 Oclock. Cleaned E-chuck with tooling. Re-test came out good. From lindaohara at snf.stanford.edu Tue Sep 21 07:37:35 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 21 Sep 2010 07:37:35 -0700 Subject: Comment asml SNF 2010-09-21 07:37:34: ASML 8" Demo Message-ID: From lindaohara at snf.stanford.edu Fri Sep 24 15:26:39 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 24 Sep 2010 15:26:39 -0700 Subject: Comment asml SNF 2010-09-24 15:26:38: ASML Up for 4" Message-ID: ASML up for 4",3D align ok too. From gsosa at snf.stanford.edu Mon Sep 27 09:36:08 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 27 Sep 2010 09:36:08 -0700 Subject: Comment asml SNF 2010-09-27 09:36:07: Hotspots 09/27 Message-ID: At least 4 hotspots on the hotspot test wafer. Cleaned the E-chuck with tooling. Re-test came out good. From lindaohara at snf.stanford.edu Tue Sep 28 08:58:06 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 28 Sep 2010 08:58:06 -0700 Subject: Comment asml SNF 2010-09-28 08:58:06: ASML DEMO Message-ID: From lindaohara at snf.stanford.edu Tue Sep 28 11:28:22 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 28 Sep 2010 11:28:22 -0700 Subject: Comment asml SNF 2010-09-28 11:28:21: ASML Released Reservations 12:00-14:00 Message-ID: From lindaohara at snf.stanford.edu Wed Sep 29 11:57:20 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 29 Sep 2010 11:57:20 -0700 Subject: Comment asml SNF 2010-09-29 11:57:19: ASML Released Reservations 12:00-14:00 Message-ID: From lindaohara at snf.stanford.edu Thu Sep 30 10:46:04 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 30 Sep 2010 10:46:04 -0700 Subject: Comment asml SNF 2010-09-30 10:46:03: ASML Released Reservations 11:00-14:00 Message-ID: