Comment asml SNF 2010-09-14 11:06:19: Hotspots 9/14

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Sep 14 11:06:20 PDT 2010


4 hotspots on test wafer. Cleaned the E-chuck with tooling and retested. Hotspot re-test OK. 




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