Problem asml SNF 2010-09-17 10:27:56: two hot spot
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Fri Sep 17 13:34:29 PDT 2010
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Problem asml SNF 2010-09-17 10:27:56: two hot spot
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Shutdown asml SNF 2010-09-19 15:22:04: Wafer got stuck
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Cleaned E-chuck with tooling and retested. Re-test came out good.
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Problem asml SNF 2010-09-17 10:27:56: two hot spot
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Shutdown asml SNF 2010-09-19 15:22:04: Wafer got stuck
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