Shutdown asml SNF 2010-09-19 15:22:04: Wafer got stuck

kibumlee at snf.stanford.edu kibumlee at snf.stanford.edu
Sun Sep 19 15:22:04 PDT 2010


wafer got stuck in P-Chuck and machine asked me to do fast startup.  I noticed later that the wafer was broken accidently while in input cassette. 




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