Shutdown asml SNF 2010-09-19 15:22:04: Wafer got stuck

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Sep 20 09:47:34 PDT 2010


Stranded wafer had a stress crack  on right side. The incomplete wafer created a vacuum error at the pre-aligner chuck. Retrieved the stranded wafer. Cleared wafer and did complete full startup. Tested wafer transfer while doing daily qual. All OK.




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