Comment asml SNF 2010-09-20 09:48:53: Hotspots 09/20

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Sep 20 09:48:53 PDT 2010

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2 hotspots on test wafer at 6 oclock and 3 Oclock. Cleaned E-chuck with tooling. Re-test came out good.

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