Comment asml SNF 2010-09-27 09:36:07: Hotspots 09/27

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Sep 27 09:36:08 PDT 2010


At least 4 hotspots on the hotspot test wafer. Cleaned the E-chuck with tooling. Re-test came out good.




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