From lindaohara at snf.stanford.edu Fri Apr 1 10:15:03 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 1 Apr 2011 10:15:03 -0700 Subject: Comment asml SNF 2011-04-01 10:15:02: ASML Released Reservations 10:30-14:00 Message-ID: From gsosa at snf.stanford.edu Mon Apr 4 07:00:17 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Apr 2011 07:00:17 -0700 Subject: Comment asml SNF 2011-03-08 10:08:54: ASML Checking Overlay Message-ID: To Archive From gsosa at snf.stanford.edu Mon Apr 4 07:00:29 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Apr 2011 07:00:29 -0700 Subject: Comment asml SNF 2011-03-08 13:55:05: ASML Stepper UP TIME ETA 1500 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Apr 4 07:00:36 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Apr 2011 07:00:36 -0700 Subject: Comment asml SNF 2011-03-08 15:38:58: ASML Stepper is up for FRONT SIDE ONLY Message-ID: To Archive From gsosa at snf.stanford.edu Mon Apr 4 07:00:42 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Apr 2011 07:00:42 -0700 Subject: Comment asml SNF 2011-03-09 21:50:03: could not start batch Message-ID: To Archive From gsosa at snf.stanford.edu Mon Apr 4 07:00:48 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Apr 2011 07:00:48 -0700 Subject: Comment asml SNF 2011-03-15 09:01:57: Hotspot 3/15 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Apr 4 07:00:57 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Apr 2011 07:00:57 -0700 Subject: Comment asml SNF 2011-03-18 09:25:49: ASML Reservations Released 3/18 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Apr 4 07:01:03 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Apr 2011 07:01:03 -0700 Subject: Comment asml SNF 2011-03-21 08:46:20: Hotspot 3/21 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Apr 4 07:01:08 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Apr 2011 07:01:08 -0700 Subject: Comment asml SNF 2011-03-22 10:33:50: Hotspot 3/22 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Apr 4 07:01:14 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Apr 2011 07:01:14 -0700 Subject: Comment asml SNF 2011-03-22 10:37:08: Reservations released 3/22 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Apr 4 07:01:19 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Apr 2011 07:01:19 -0700 Subject: Comment asml SNF 2011-03-23 09:23:52: Hotspot 3/23 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Apr 4 07:01:24 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Apr 2011 07:01:24 -0700 Subject: Comment asml SNF 2011-03-23 09:39:22: ASML Released Reservations 10:00-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Apr 4 07:01:36 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Apr 2011 07:01:36 -0700 Subject: Comment asml SNF 2011-03-24 12:13:37: Hotspot 3/24 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Apr 4 07:01:45 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Apr 2011 07:01:45 -0700 Subject: Comment asml SNF 2011-03-25 09:53:10: ASML Released Reservations 10:00-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Apr 4 07:01:50 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Apr 2011 07:01:50 -0700 Subject: Comment asml SNF 2011-03-28 08:57:58: Hotspot 3/28 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Apr 4 07:01:54 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Apr 2011 07:01:54 -0700 Subject: Comment asml SNF 2011-03-29 09:03:31: ASML Released Reservations 9:30-12:30 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Apr 4 07:02:02 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Apr 2011 07:02:02 -0700 Subject: Comment asml SNF 2011-03-29 18:21:31: reticle with no id inside snf box Message-ID: To Archive From gsosa at snf.stanford.edu Mon Apr 4 07:02:07 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Apr 2011 07:02:07 -0700 Subject: Comment asml SNF 2011-03-30 12:11:07: ASML Released Reservations 12:30-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Apr 4 07:02:11 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Apr 2011 07:02:11 -0700 Subject: Comment asml SNF 2011-03-30 15:15:31: Hotspot 3/30 am Message-ID: To Archive From gsosa at snf.stanford.edu Mon Apr 4 07:02:25 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Apr 2011 07:02:25 -0700 Subject: Comment asml SNF 2011-04-01 10:15:02: ASML Released Reservations 10:30-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Mon Apr 4 09:46:13 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Apr 2011 09:46:13 -0700 Subject: Comment asml SNF 2011-04-04 09:46:12: Hotspot 4/4 Message-ID: Tiny hotspot at very edge of wafer(10 Oclock). Cleaned Echuck with tooling. Retest OK From lindaohara at snf.stanford.edu Tue Apr 5 07:44:31 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 5 Apr 2011 07:44:31 -0700 Subject: Comment asml SNF 2011-04-05 07:44:31: ASML 3" & 4" Demo Message-ID: From joho at snf.stanford.edu Tue Apr 5 14:37:37 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Tue, 5 Apr 2011 14:37:37 -0700 Subject: Comment asml SNF 2011-04-05 14:37:36: Releasing reservation 1430 to 1500 hour Message-ID: Completed ASML DEMO, checked system's energy and hot spot. No hot spots found, and energy is ok. Releasing the rest of the reserved time. From lindaohara at snf.stanford.edu Wed Apr 6 10:39:05 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 6 Apr 2011 10:39:05 -0700 Subject: Comment asml SNF 2011-04-06 10:39:05: ASML Released Reservations 11:00-14:00 Message-ID: From lindaohara at snf.stanford.edu Thu Apr 7 08:49:23 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 7 Apr 2011 08:49:23 -0700 Subject: Comment asml SNF 2011-04-07 08:49:23: ASML DEMO Message-ID: From lindaohara at snf.stanford.edu Thu Apr 7 11:08:50 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 7 Apr 2011 11:08:50 -0700 Subject: Comment asml SNF 2011-04-07 11:08:50: ASML Demo Completed and Released Res Message-ID: ASML released reservations 11:30-14:00 From lindaohara at snf.stanford.edu Fri Apr 8 08:13:45 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 8 Apr 2011 08:13:45 -0700 Subject: Comment asml SNF 2011-04-08 08:13:44: ASML DEMO Message-ID: From hongyuc at snf.stanford.edu Sat Apr 9 22:32:07 2011 From: hongyuc at snf.stanford.edu (hongyuc at snf.stanford.edu) Date: Sat, 9 Apr 2011 22:32:07 -0700 Subject: Problem asml SNF 2011-04-09 22:32:06: wafer stuck in the robot Message-ID: wafer exposed fine, but it wil not eject it from the machine - the cassette will not go down and the wafer is stuck in the robot. From karthikv at snf.stanford.edu Sun Apr 10 01:22:02 2011 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Sun, 10 Apr 2011 01:22:02 -0700 Subject: Comment asml SNF 2011-04-10 01:22:02: Wafer removed Message-ID: Removed previous user's wafer from robot by going to Material Handling and choosing the appropriate command. Cycled a dummy wafer and did not face any problems. From gsosa at snf.stanford.edu Mon Apr 11 08:21:19 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 11 Apr 2011 08:21:19 -0700 Subject: Problem asml SNF 2011-04-09 22:32:06: wafer stuck in the robot Message-ID: System is OK From joho at snf.stanford.edu Tue Apr 12 08:03:17 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Tue, 12 Apr 2011 08:03:17 -0700 Subject: Comment asml SNF 2011-04-12 08:03:16: Starting QPM Message-ID: Starting QPM From joho at snf.stanford.edu Tue Apr 12 16:02:36 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Tue, 12 Apr 2011 16:02:36 -0700 Subject: Comment asml SNF 2011-04-12 16:02:35: ASML Stepper will not be up at 4PM Message-ID: QPM issues delayed the systems RTP. ETA for system up is 1800 hour on 04/12/11. From joho at snf.stanford.edu Tue Apr 12 18:41:24 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Tue, 12 Apr 2011 18:41:24 -0700 Subject: Shutdown asml SNF 2011-04-12 18:41:24: ASML Down for Wafer Loading Issue Message-ID: During the QPM it was noticed that the tool was not loading wafer's properly in the Y Directiong (Translation), and the data would not come into spec when calibrating the system. Current Game Plan is to finish collecting data for Tech Support to Verify. ETA RTP is 04/13/11 @ 1600 hour. From joho at snf.stanford.edu Wed Apr 13 15:13:47 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Wed, 13 Apr 2011 15:13:47 -0700 Subject: Shutdown asml SNF 2011-04-12 18:41:24: ASML Down for Wafer Loading Issue Message-ID: Loading issue resolved, and reproducibility test's were ran afterwards to verify the wafer loading. System will be available around 1600 hour 04/13/11 From joho at snf.stanford.edu Wed Apr 13 16:10:03 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Wed, 13 Apr 2011 16:10:03 -0700 Subject: Comment asml SNF 2011-04-13 16:10:02: ASML Stepper RTP Message-ID: System is back up for front SIDE ONLY. Issue with the Wafer Loading has been resolved, and verified OK. System is NOT OK for back side. From lindaohara at snf.stanford.edu Thu Apr 14 09:09:03 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 14 Apr 2011 09:09:03 -0700 Subject: Comment asml SNF 2011-04-14 09:09:02: Horspot Ck Message-ID: Found 5 hotspots on lower part of wafer. Joey cleaned E-Chuck, no hotspots From joho at snf.stanford.edu Thu Apr 14 16:09:58 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Thu, 14 Apr 2011 16:09:58 -0700 Subject: Comment asml SNF 2011-04-14 16:09:58: ASML Stepper is OK to use Message-ID: QPM completed. System is up for front and back side alignment. From gsosa at snf.stanford.edu Mon Apr 18 09:13:25 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 18 Apr 2011 09:13:25 -0700 Subject: Comment asml SNF 2011-04-18 09:13:25: Hotspot 4/18 Message-ID: Small hotspot at 2 Oclock. Cleaned E-chuck with tooling. Re-test OK. From lindaohara at snf.stanford.edu Tue Apr 19 08:39:52 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 19 Apr 2011 08:39:52 -0700 Subject: Comment asml SNF 2011-04-19 08:39:51: ASML Demo Time Message-ID: From gsosa at snf.stanford.edu Tue Apr 19 12:25:19 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 19 Apr 2011 12:25:19 -0700 Subject: Comment asml SNF 2011-04-19 12:25:19: Hotspot 4/19 Message-ID: 2 tiny hotspts on test wafer. Cleaned E-chuck with tooling. re-test OK From gsosa at snf.stanford.edu Tue Apr 19 13:36:26 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 19 Apr 2011 13:36:26 -0700 Subject: Shutdown asml SNF 2011-04-19 13:36:25: Stepper Down 4/19 Message-ID: Vendor needs to check out possible corrupt directory. The FSE is on his way in. From gsosa at snf.stanford.edu Tue Apr 19 15:50:52 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 19 Apr 2011 15:50:52 -0700 Subject: Shutdown asml SNF 2011-04-19 13:36:25: Stepper Down 4/19 Message-ID: The user_data directory got corrupted and had to be restored. The FSE did a disk to disk restore ( Disk 0 to Disk 1). The last full back up of the disk was on April 14in the morning. After restore, tested system operation and did IQC test- All OK. NOTICE: If you loaded a job onto the harddisk after 12:00 Noon on April 14th , you will have to reload your job onto the harddisk. Also, any batch reports after this time will be gone. From gsosa at snf.stanford.edu Tue Apr 19 15:53:22 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 19 Apr 2011 15:53:22 -0700 Subject: Comment asml SNF 2011-04-19 15:53:22: Please Read- Important Message-ID: The user_data directory got corrupted and had to be restored. This is the directory that stores all of the user jobs and batch reports. The FSE did a disk to disk restore ( Disk 0 to Disk 1) to repair the problem. The last full back up of the disk was on April 14, in the morning. After restore, tested system operation and did IQC test- All OK. NOTICE: If you loaded a job onto the harddisk after 12:00 Noon on April 14th , you will have to reload your job onto the harddisk. Also, any batch reports after this time will be gone. From lindaohara at snf.stanford.edu Wed Apr 20 10:13:22 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 20 Apr 2011 10:13:22 -0700 Subject: Comment asml SNF 2011-04-20 10:13:21: ASML Demo Time Message-ID: From gsosa at snf.stanford.edu Thu Apr 21 07:11:49 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 21 Apr 2011 07:11:49 -0700 Subject: Comment asml SNF 2011-03-31 09:23:31: Hotspot 3/31 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Apr 21 07:11:54 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 21 Apr 2011 07:11:54 -0700 Subject: Comment asml SNF 2011-04-04 09:46:12: Hotspot 4/4 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Apr 21 07:11:59 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 21 Apr 2011 07:11:59 -0700 Subject: Comment asml SNF 2011-04-05 07:44:31: ASML 3" & 4" Demo Message-ID: To Archive From gsosa at snf.stanford.edu Thu Apr 21 07:12:04 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 21 Apr 2011 07:12:04 -0700 Subject: Comment asml SNF 2011-04-05 14:37:36: Releasing reservation 1430 to 1500 hour Message-ID: To Archive From gsosa at snf.stanford.edu Thu Apr 21 07:12:09 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 21 Apr 2011 07:12:09 -0700 Subject: Comment asml SNF 2011-04-06 10:39:05: ASML Released Reservations 11:00-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Apr 21 07:12:14 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 21 Apr 2011 07:12:14 -0700 Subject: Comment asml SNF 2011-04-07 08:49:23: ASML DEMO Message-ID: To Archive From gsosa at snf.stanford.edu Thu Apr 21 07:12:19 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 21 Apr 2011 07:12:19 -0700 Subject: Comment asml SNF 2011-04-07 11:08:50: ASML Demo Completed and Released Res Message-ID: To Archive From gsosa at snf.stanford.edu Thu Apr 21 07:12:28 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 21 Apr 2011 07:12:28 -0700 Subject: Comment asml SNF 2011-04-08 08:13:44: ASML DEMO Message-ID: To Archive From gsosa at snf.stanford.edu Thu Apr 21 07:12:37 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 21 Apr 2011 07:12:37 -0700 Subject: Comment asml SNF 2011-04-10 01:22:02: Wafer removed Message-ID: To Archive From gsosa at snf.stanford.edu Thu Apr 21 07:12:44 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 21 Apr 2011 07:12:44 -0700 Subject: Comment asml SNF 2011-04-12 08:03:16: Starting QPM Message-ID: To Archive From gsosa at snf.stanford.edu Thu Apr 21 07:12:57 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 21 Apr 2011 07:12:57 -0700 Subject: Comment asml SNF 2011-04-12 16:02:35: ASML Stepper will not be up at 4PM Message-ID: To Archive From gsosa at snf.stanford.edu Thu Apr 21 07:13:03 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 21 Apr 2011 07:13:03 -0700 Subject: Comment asml SNF 2011-04-13 16:10:02: ASML Stepper RTP Message-ID: To Archive From gsosa at snf.stanford.edu Thu Apr 21 07:13:08 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 21 Apr 2011 07:13:08 -0700 Subject: Comment asml SNF 2011-04-14 09:09:02: Horspot Ck Message-ID: To Archive From gsosa at snf.stanford.edu Thu Apr 21 07:13:17 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 21 Apr 2011 07:13:17 -0700 Subject: Comment asml SNF 2011-04-14 16:09:58: ASML Stepper is OK to use Message-ID: To Archive From mahnaz at snf.stanford.edu Thu Apr 21 09:39:51 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 21 Apr 2011 09:39:51 -0700 Subject: Problem asml SNF 2011-04-21 09:39:51: Back side is about 10 um off Message-ID: The last few tests and caliberation done on the tool shows that back side alignment is off about 10 um. It might be caused by particle on the table or table hight, not sure. So please check your process and talk to any one of us if you need help. Asml folks are working on a plan to fix the problem. From gsosa at snf.stanford.edu Mon Apr 25 08:19:57 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 25 Apr 2011 08:19:57 -0700 Subject: Comment asml SNF 2011-04-25 08:19:56: Hotspot 4/25 Message-ID: 1 hotspot at edge( 10 Oclock). Cleaned with tooling. Retest OK From kokab at snf.stanford.edu Tue Apr 26 05:41:59 2011 From: kokab at snf.stanford.edu (kokab at snf.stanford.edu) Date: Tue, 26 Apr 2011 05:41:59 -0700 Subject: Problem asml SNF 2011-04-26 05:41:58: my wafers are stuck incide tool Message-ID: From lindaohara at snf.stanford.edu Tue Apr 26 08:14:58 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 26 Apr 2011 08:14:58 -0700 Subject: Shutdown asml SNF 2011-04-26 08:14:58: Wafer lost in Machine Message-ID: Need Service Engineer to find wafer From joho at snf.stanford.edu Tue Apr 26 11:57:37 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Tue, 26 Apr 2011 11:57:37 -0700 Subject: Shutdown asml SNF 2011-04-26 08:14:58: Wafer lost in Machine Message-ID: Recovered the system from the WH issue, system failed to pick up wafer due to vac issue in the wafer handling robot. Tested 2 batches of 25 wafers, and no issues found. System will be available after DEMO time. Thank you. From joho at snf.stanford.edu Tue Apr 26 11:57:43 2011 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Tue, 26 Apr 2011 11:57:43 -0700 Subject: Problem asml SNF 2011-04-26 05:41:58: my wafers are stuck incide tool Message-ID: Recovered the system from the WH issue, system failed to pick up wafer due to vac issue in the wafer handling robot. Tested 2 batches of 25 wafers, and no issues found. System will be available after DEMO time. Thank you. From rik at snf.stanford.edu Tue Apr 26 23:18:59 2011 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Tue, 26 Apr 2011 23:18:59 -0700 Subject: Comment asml SNF 2011-04-26 23:18:58: Possible hotspot in center Message-ID: Tried exposing 400nm line space pattern. Exposes correcting on edge die, but not in center ones. Suspecting a particle in the center of the chuck. From lindaohara at snf.stanford.edu Wed Apr 27 08:51:56 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 27 Apr 2011 08:51:56 -0700 Subject: Comment asml SNF 2011-04-27 08:51:56: Hotspot Ck OK Message-ID: Exposed 2 wafers for hotspots and found no hotspots From lindaohara at snf.stanford.edu Wed Apr 27 13:49:47 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 27 Apr 2011 13:49:47 -0700 Subject: Shutdown asml SNF 2011-04-27 13:49:47: Residue on backside of Wafer Message-ID: Stepper leaving residue on rt backside of wafer From stemori at snf.stanford.edu Wed Apr 27 16:14:53 2011 From: stemori at snf.stanford.edu (stemori at snf.stanford.edu) Date: Wed, 27 Apr 2011 16:14:53 -0700 Subject: Shutdown asml SNF 2011-04-27 13:49:47: Residue on backside of Wafer Message-ID: Cleaned the wafer table, Dipod both arms, D-chuck, P-chuck and Robot for residue on backside of the wafer and possible hot spot. Hot spot check ok no hot spot. From lindaohara at snf.stanford.edu Fri Apr 29 08:50:34 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 29 Apr 2011 08:50:34 -0700 Subject: Comment asml SNF 2011-04-29 08:50:33: ASML Time Message-ID: From luckys at snf.stanford.edu Fri Apr 29 17:00:26 2011 From: luckys at snf.stanford.edu (luckys at snf.stanford.edu) Date: Fri, 29 Apr 2011 17:00:26 -0700 Subject: Problem asml SNF 2011-04-29 17:00:25: Batch run error Message-ID: A system error prohibits the regular functionality of the machine. the previous users wafer got stuck. Mahanaz checked it but still the problem has yet to be resolved. It is better to wait until the problem is fixed/clarified by staff next week. From mahnaz at snf.stanford.edu Fri Apr 29 20:30:41 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 29 Apr 2011 20:30:41 -0700 Subject: Problem asml SNF 2011-04-29 20:30:41: wafer handling error Message-ID: I cleared one lab member wafers and did a fast startup. Lucky ran two wafers that I checked the wafers and pass the inspection. His wafers got stuck too. Ran the CMHd and removed the wafers and did full startup. But I told Lucky to shut down the system if any other wafers got stuck. Left a voice mail for Joey. From wanglele501 at snf.stanford.edu Fri Apr 29 22:54:24 2011 From: wanglele501 at snf.stanford.edu (wanglele501 at snf.stanford.edu) Date: Fri, 29 Apr 2011 22:54:24 -0700 Subject: Shutdown asml SNF 2011-04-29 22:54:23: wafer stuck and system error Message-ID: Wafer still stays at the bottom of the input port. Seems like robot arm fails to hold the wafer? Tried a fast startup but it does not work since the tool assume there is a wafer inside. From gsosa at snf.stanford.edu Sat Apr 30 21:14:33 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sat, 30 Apr 2011 21:14:33 -0700 Subject: Shutdown asml SNF 2011-04-29 22:54:23: wafer stuck and system error Message-ID: Wafer transfer error from input cassette to robot. Recovered system and tested useres wafer and it failed again. Noticed that the cassette was not sitting flat on the elevator platform. Reseated the sane cassette and re-tested the same users wafers- No problem, wafer loaded fine. Checked and made slight adjustment to cassette locating block(moved left block slightly out.). Tested with both ASML black cassettes- All OK. From gsosa at snf.stanford.edu Sat Apr 30 21:28:06 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sat, 30 Apr 2011 21:28:06 -0700 Subject: Comment asml SNF 2011-04-30 21:28:06: System Status 4/30 Message-ID: Wafer transfer error from input cassette to robot. Recovered system and tested useres wafer and it failed again. Noticed that the cassette was not sitting flat on the elevator platform. Reseated the sane cassette and re-tested the same users wafers- No problem, wafer loaded fine. Checked and made slight adjustment to cassette locating block(moved left block slightly out.). Tested with both ASML black cassettes- All OK. System OK to use but continue to report any problems. System still has intermittant carrier inspection failures. Recovery is to retry the batch .