Problem asml SNF 2011-04-09 22:32:06: wafer stuck in the robot

hongyuc at snf.stanford.edu hongyuc at snf.stanford.edu
Sat Apr 9 22:32:07 PDT 2011


wafer exposed fine, but it wil not eject it from the machine - the cassette will not go down and the wafer is stuck in the robot.




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