Problem asml SNF 2011-04-09 22:32:06: wafer stuck in the robot
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Mon Apr 11 08:21:19 PDT 2011
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Problem asml SNF 2011-04-09 22:32:06: wafer stuck in the robot
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Comment asml SNF 2011-04-10 01:22:02: Wafer removed
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System is OK
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Problem asml SNF 2011-04-09 22:32:06: wafer stuck in the robot
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Comment asml SNF 2011-04-10 01:22:02: Wafer removed
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