Shutdown asml SNF 2011-04-12 18:41:24: ASML Down for Wafer Loading Issue

joho at snf.stanford.edu joho at snf.stanford.edu
Tue Apr 12 18:41:24 PDT 2011


During the QPM it was noticed that the tool was not loading wafer's properly in the Y Directiong (Translation), and the data would not come into spec when calibrating the system. Current Game Plan is to finish collecting data for Tech Support to Verify. ETA RTP is 04/13/11 @ 1600 hour.




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