Shutdown asml SNF 2011-04-12 18:41:24: ASML Down for Wafer Loading Issue

joho at snf.stanford.edu joho at snf.stanford.edu
Wed Apr 13 15:13:47 PDT 2011


Loading issue resolved, and reproducibility test's were ran afterwards to verify the wafer loading. System will be available around 1600 hour 04/13/11




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