Comment asml SNF 2011-04-19 12:25:19: Hotspot 4/19
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Tue Apr 19 12:25:19 PDT 2011
2 tiny hotspts on test wafer. Cleaned E-chuck with tooling. re-test OK
More information about the asml-pcs
mailing list