Problem asml SNF 2011-04-21 09:39:51: Back side is about 10 um off

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Thu Apr 21 09:39:51 PDT 2011


The last few tests and caliberation done on the tool shows that  back 
side alignment is off about 10 um. It might be caused by particle on the table or table hight, not sure.
So please check your process and talk to any one of us if you need 
help.
Asml folks are working on a plan to fix the problem.




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