Shutdown asml SNF 2011-04-26 08:14:58: Wafer lost in Machine
lindaohara at snf.stanford.edu
lindaohara at snf.stanford.edu
Tue Apr 26 08:14:58 PDT 2011
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Problem asml SNF 2011-04-26 05:41:58: my wafers are stuck incide tool
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Shutdown asml SNF 2011-04-26 08:14:58: Wafer lost in Machine
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Need Service Engineer to find wafer
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Problem asml SNF 2011-04-26 05:41:58: my wafers are stuck incide tool
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Shutdown asml SNF 2011-04-26 08:14:58: Wafer lost in Machine
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