Problem asml SNF 2011-04-26 05:41:58: my wafers are stuck incide tool

joho at snf.stanford.edu joho at snf.stanford.edu
Tue Apr 26 11:57:43 PDT 2011


Recovered the system from the WH issue, system failed to pick up wafer due to vac issue in the wafer handling robot. Tested 2 batches of 25 wafers, and no issues found. System will be available after DEMO time. Thank you.




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