Comment asml SNF 2011-04-26 23:18:58: Possible hotspot in center

rik at snf.stanford.edu rik at snf.stanford.edu
Tue Apr 26 23:18:59 PDT 2011


Tried exposing 400nm line space pattern. Exposes correcting on edge die, but not in center ones. Suspecting a particle in the center of the chuck. 




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