Comment asml SNF 2011-04-27 08:51:56: Hotspot Ck OK
lindaohara at snf.stanford.edu
lindaohara at snf.stanford.edu
Wed Apr 27 08:51:56 PDT 2011
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Comment asml SNF 2011-04-26 23:18:58: Possible hotspot in center
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Shutdown asml SNF 2011-04-27 13:49:47: Residue on backside of Wafer
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Exposed 2 wafers for hotspots and found no hotspots
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Comment asml SNF 2011-04-26 23:18:58: Possible hotspot in center
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Shutdown asml SNF 2011-04-27 13:49:47: Residue on backside of Wafer
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