Shutdown asml SNF 2011-04-27 13:49:47: Residue on backside of Wafer

stemori at stemori at
Wed Apr 27 16:14:53 PDT 2011

Cleaned the wafer table, Dipod both arms, D-chuck, P-chuck and Robot for residue on backside of the wafer and possible hot spot. Hot spot check ok no hot spot.

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