Problem asml SNF 2011-04-29 17:00:25: Batch run error

luckys at luckys at
Fri Apr 29 17:00:26 PDT 2011

A system error prohibits the regular functionality of the machine. the previous users wafer got stuck. Mahanaz checked it but still the problem has yet to be resolved. It is better to wait until the problem is fixed/clarified by staff next week. 

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