Problem asml SNF 2011-04-29 20:30:41: wafer handling error

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Fri Apr 29 20:30:41 PDT 2011


I cleared one lab member wafers and did a fast startup.
Lucky ran two wafers that I checked the wafers and pass the inspection. His wafers got stuck too. Ran the CMHd and removed the wafers and did full startup.   But I told Lucky to shut down the system if any other wafers got stuck.
Left a voice mail for Joey.




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