Problem asml SNF 2011-04-29 20:30:41: wafer handling error

[mahnaz at snf.stanford.edu]

I cleared one lab member wafers and did a fast startup.
Lucky ran two wafers that I checked the wafers and pass the inspection. His wafers got stuck too. Ran the CMHd and removed the wafers and did full startup.   But I told Lucky to shut down the system if any other wafers got stuck.
Left a voice mail for Joey.