Shutdown asml SNF 2011-04-29 22:54:23: wafer stuck and system error

wanglele501 at wanglele501 at
Fri Apr 29 22:54:24 PDT 2011

Wafer still stays at the bottom of the input port. Seems like robot arm    fails to hold the wafer? Tried a fast startup but it does not work since    the tool assume there is a wafer inside.

More information about the asml-pcs mailing list