Shutdown asml SNF 2011-04-29 22:54:23: wafer stuck and system error

wanglele501 at snf.stanford.edu wanglele501 at snf.stanford.edu
Fri Apr 29 22:54:24 PDT 2011


Wafer still stays at the bottom of the input port. Seems like robot arm    fails to hold the wafer? Tried a fast startup but it does not work since    the tool assume there is a wafer inside.




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