Shutdown asml SNF 2011-04-29 22:54:23: wafer stuck and system error

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Sat Apr 30 21:14:33 PDT 2011


Wafer transfer error from input cassette to robot. Recovered system and tested useres wafer and it failed again. Noticed that the cassette was not sitting flat on the elevator platform. Reseated the sane cassette and re-tested the same users wafers- No problem, wafer loaded fine. Checked and made slight adjustment to cassette locating block(moved left block slightly out.). Tested with both ASML black cassettes- All OK. 




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