Comment asml SNF 2011-04-30 21:28:06: System Status 4/30

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Sat Apr 30 21:28:06 PDT 2011


Wafer transfer error from input cassette to robot. Recovered system and tested useres wafer and it failed again. Noticed that the cassette was not sitting flat on the elevator platform. Reseated the sane cassette and re-tested the same users wafers- No problem, wafer loaded fine. Checked and made slight adjustment to cassette locating block(moved left block slightly out.). Tested with both ASML black cassettes- All OK.  System OK to use but continue to report any problems.  System still has intermittant carrier inspection failures. Recovery is to retry the batch .




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