From gsosa at snf.stanford.edu Mon Aug 1 10:10:11 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 1 Aug 2011 10:10:11 -0700 Subject: Comment asml SNF 2011-08-01 10:10:11: Hotspot 8/1 Message-ID: 1 hotspot near edge of wafer @ 3 oclock position. Cleaned E-chuck with tooling. Re-test OK. From gsosa at snf.stanford.edu Tue Aug 2 12:24:19 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Aug 2011 12:24:19 -0700 Subject: Comment asml SNF 2011-08-02 12:24:19: Hotspot 8/2 Message-ID: 1 hotspot near major flat on right side. Cleaned E-chuck with tooling. Retest OK. From lindaohara at snf.stanford.edu Wed Aug 3 13:19:17 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 3 Aug 2011 13:19:17 -0700 Subject: Comment asml SNF 2011-08-03 13:19:16: ASML Released Reservations 13:30-16:00 Message-ID: From gsosa at snf.stanford.edu Thu Aug 4 07:26:29 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 4 Aug 2011 07:26:29 -0700 Subject: Comment asml SNF 2011-07-01 13:08:07: ASML Released Reservations 13:30-16:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 4 07:26:35 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 4 Aug 2011 07:26:35 -0700 Subject: Comment asml SNF 2011-07-05 10:44:13: Reservations Released 7/5 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 4 07:26:43 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 4 Aug 2011 07:26:43 -0700 Subject: Comment asml SNF 2011-07-06 12:49:58: Matinenance Actions Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 4 07:26:53 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 4 Aug 2011 07:26:53 -0700 Subject: Comment asml SNF 2011-07-07 11:56:02: ASML Released Reservations 12:30-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 4 07:27:00 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 4 Aug 2011 07:27:00 -0700 Subject: Comment asml SNF 2011-07-12 12:06:32: ASML Released Reservations 12:30-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 4 07:28:44 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 4 Aug 2011 07:28:44 -0700 Subject: Comment asml SNF 2011-07-08 12:04:59: ASML Released Reservations 12:30-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 4 07:28:53 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 4 Aug 2011 07:28:53 -0700 Subject: Comment asml SNF 2011-07-15 09:42:08: ASML Released Reservations 10:00-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 4 07:29:04 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 4 Aug 2011 07:29:04 -0700 Subject: Comment asml SNF 2011-07-21 11:50:44: Stepper is Up 7/21 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 4 07:29:08 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 4 Aug 2011 07:29:08 -0700 Subject: Comment asml SNF 2011-07-21 11:53:21: Reservations Released 7/21 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 4 07:29:15 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 4 Aug 2011 07:29:15 -0700 Subject: Comment asml SNF 2011-07-28 13:13:53: ASML Released Reservations 13:30-16:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 4 07:29:22 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 4 Aug 2011 07:29:22 -0700 Subject: Comment asml SNF 2011-07-29 10:41:57: ASML Released Reservations 11:00-16:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 4 07:29:46 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 4 Aug 2011 07:29:46 -0700 Subject: Comment asml SNF 2011-06-29 09:26:30: ASML To Replace Shutter Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 4 07:30:16 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 4 Aug 2011 07:30:16 -0700 Subject: Comment asml SNF 2011-06-24 13:03:39: Hotspot Ck Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 4 07:30:22 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 4 Aug 2011 07:30:22 -0700 Subject: Comment asml SNF 2011-06-30 09:49:05: Hotspot ck Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 4 07:30:32 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 4 Aug 2011 07:30:32 -0700 Subject: Comment asml SNF 2011-07-26 09:54:11: Hotspot 7/26 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 4 07:30:40 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 4 Aug 2011 07:30:40 -0700 Subject: Comment asml SNF 2011-07-27 11:38:46: Hotspot Ck-1 hotspot Message-ID: To Archive From gsosa at snf.stanford.edu Thu Aug 4 12:32:58 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 4 Aug 2011 12:32:58 -0700 Subject: Comment asml SNF 2011-08-04 12:32:58: Hotspot 8/4 Message-ID: 1 hotspot on test wafer. Cleaned E-chuck with tooling. Retest OK. From lindaohara at snf.stanford.edu Fri Aug 5 08:46:52 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 5 Aug 2011 08:46:52 -0700 Subject: Comment asml SNF 2011-08-05 08:46:51: Port 4 Hinges Broken Message-ID: Found Port 4 hinges broken. ASML replaced both hinges. If the hinges break, please report it as a problem. Thanks, Linda Ohara From lindaohara at snf.stanford.edu Fri Aug 5 09:45:38 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 5 Aug 2011 09:45:38 -0700 Subject: Comment asml SNF 2011-08-05 09:45:37: HOTSPOT CK, 2 HOTSPOTS Message-ID: Found 2 hotspots at 6:00 and 7:00 o'clock positions. ASML cleaned E-Chuck, no hotspots. PLEASE CHECK THE BACK OF YOUR WAFERS AND SRD THE WAFERS. Inspect the back to make sure that there are no particles before you put the wafers through the ASML. Thank you, Linda Ohara ASML From lindaohara at snf.stanford.edu Fri Aug 5 11:10:02 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 5 Aug 2011 11:10:02 -0700 Subject: Comment asml SNF 2011-08-05 11:10:02: ASML Released Reservations 11:30-13:00 Message-ID: From lindaohara at snf.stanford.edu Mon Aug 8 10:40:21 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Mon, 8 Aug 2011 10:40:21 -0700 Subject: Comment asml SNF 2011-08-08 10:40:20: ASML Released Reservations 11:00-13:00 Message-ID: From gsosa at snf.stanford.edu Tue Aug 9 09:28:51 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 9 Aug 2011 09:28:51 -0700 Subject: Comment asml SNF 2011-08-09 09:28:50: Hotspot 8/9 Message-ID: One hotspot at top/left edge of wafer. Cleaned the E-chuck with tooling. Retest OK. From lindaohara at snf.stanford.edu Wed Aug 10 10:25:35 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 10 Aug 2011 10:25:35 -0700 Subject: Comment asml SNF 2011-08-10 10:25:34: ASML Released Reservations 10:30-16:00 Message-ID: From vilanova at snf.stanford.edu Thu Aug 11 09:58:16 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 11 Aug 2011 09:58:16 -0700 Subject: Comment asml SNF 2011-08-11 09:58:16: Hotspot 8/11 Message-ID: One hotspot at Bottom /Right edge of wafer. Cleaned the E-chuck with tooling. Retest OK. From wslee at snf.stanford.edu Thu Aug 11 16:28:55 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Thu, 11 Aug 2011 16:28:55 -0700 Subject: Problem asml SNF 2011-08-11 16:28:54: unable to load disk Message-ID: I hit the 'eject' disk button from within the asml software several times. Whenever I entered the fdmount /mnt command, it responded /mnt not found. Software needs to be reset? From vilanova at snf.stanford.edu Fri Aug 12 08:25:03 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 12 Aug 2011 08:25:03 -0700 Subject: Problem asml SNF 2011-08-11 16:28:54: unable to load disk Message-ID: Checked Units command Lines and eject/mnt works Fine, tested a couple of times, cant duplicate the user problem , ok to use. From lindaohara at snf.stanford.edu Fri Aug 12 11:41:28 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 12 Aug 2011 11:41:28 -0700 Subject: Comment asml SNF 2011-08-12 11:41:18: ASML Released Reservations 12:00-16:00 Message-ID: From bmcguirk at snf.stanford.edu Mon Aug 15 08:19:33 2011 From: bmcguirk at snf.stanford.edu (bmcguirk at snf.stanford.edu) Date: Mon, 15 Aug 2011 08:19:33 -0700 Subject: Comment asml SNF 2011-08-15 08:19:33: PM item completed Message-ID: All, I performed a disk 2 disk back up as requested. The asml system is now idle and ready for SNF use. Bert Mcguirk ASML From vilanova at snf.stanford.edu Mon Aug 15 09:14:37 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 15 Aug 2011 09:14:37 -0700 Subject: Comment asml SNF 2011-08-15 09:14:37: Reservations Release From 9:00AM to 11:00AM Message-ID: From vilanova at snf.stanford.edu Wed Aug 17 09:10:06 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 17 Aug 2011 09:10:06 -0700 Subject: Comment asml SNF 2011-08-17 09:10:05: HOTSPOT FOUND AT 11 OCLOCK TOP/ LEFT Message-ID: One hotspot at Top/Left ( 11 Oclock ) edge of wafer. Cleaned the E-chuck with tooling. Retest OK. From lindaohara at snf.stanford.edu Thu Aug 18 14:38:22 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 18 Aug 2011 14:38:22 -0700 Subject: Comment asml SNF 2011-08-18 14:38:21: ASML Released Reservations 15:00-16:00 Message-ID: From gsosa at snf.stanford.edu Thu Aug 18 14:43:55 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 18 Aug 2011 14:43:55 -0700 Subject: Comment asml SNF 2011-08-18 14:43:54: Hotspots 8/18 Message-ID: 3 hotspots on test wafer near edge. Cleaned the E-chuck with tooling. Retest OK. From bchui at snf.stanford.edu Tue Aug 23 19:03:38 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Tue, 23 Aug 2011 19:03:38 -0700 Subject: Shutdown asml SNF 2011-08-23 19:03:37: System error Message-ID: When first wafer entered the system, it got stuck on the E-chuck. I tried FAST STARTUP and FULL STARTUP but both failed. Machine reports error in restarting the Wafer Handling system. My wafer is still stuck on the E-chuck. From gsosa at snf.stanford.edu Wed Aug 24 08:12:08 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 24 Aug 2011 08:12:08 -0700 Subject: Shutdown asml SNF 2011-08-23 19:03:37: System error Message-ID: Wafer failed transfer from Dipod input to E-chuck due to vacuum sense error. Recovered wafer from system and did a full hardware reset. Attempted to cycle a clean test wafer through the system but had the same error. Recovered the test wafer and cleaned the Input Dipod surface. Retest of wafer handling OK. Exposed a hotspot wafer- Also OK. From gsosa at snf.stanford.edu Wed Aug 24 08:14:26 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 24 Aug 2011 08:14:26 -0700 Subject: Shutdown asml SNF 2011-08-24 08:14:26: Scheduled Shutdown 8/24 Message-ID: System shutdown during the Litho humidity experiment From gsosa at snf.stanford.edu Wed Aug 24 13:30:58 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 24 Aug 2011 13:30:58 -0700 Subject: Shutdown asml SNF 2011-08-24 08:14:26: Scheduled Shutdown 8/24 Message-ID: Humidity experiment completed. System is stable and ready to use. From mahnaz at snf.stanford.edu Fri Aug 26 15:23:49 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 26 Aug 2011 15:23:49 -0700 Subject: Shutdown asml SNF 2011-08-26 15:23:48: wafer is stuck Message-ID: Gary is trying to get the wf out. From gsosa at snf.stanford.edu Fri Aug 26 16:30:09 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 26 Aug 2011 16:30:09 -0700 Subject: Shutdown asml SNF 2011-08-26 15:23:48: wafer is stuck Message-ID: Removed the stranded wafer from the E-table. Did an E-table clean while I had the stone out. Re-initialized all hardware. Tested system by exposing a hotspot wafer. All OK. From gsosa at snf.stanford.edu Tue Aug 30 10:52:22 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 30 Aug 2011 10:52:22 -0700 Subject: Comment asml SNF 2011-08-30 10:52:22: Reservations Released 8/30 Message-ID: ASML Tool reservations released for the remainder of the day. Stepper is up and available for use. From bchui at snf.stanford.edu Wed Aug 31 00:42:47 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Wed, 31 Aug 2011 00:42:47 -0700 Subject: Comment asml SNF 2011-08-31 00:42:47: Emulator floppy drive down Message-ID: Can't seem to be able to mount or un-mount the /mnt drive. Can someone please look into it (reboot)? Thanks! From emyers at snf.stanford.edu Wed Aug 31 08:10:47 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 31 Aug 2011 08:10:47 -0700 Subject: Comment asml SNF 2011-08-31 00:42:47: Emulator floppy drive down Message-ID: rebooted system From lindaohara at snf.stanford.edu Wed Aug 31 10:17:15 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 31 Aug 2011 10:17:15 -0700 Subject: Comment asml SNF 2011-08-31 10:17:15: ASML Released Reservations 11:00-14:00 Message-ID: