Comment asml SNF 2011-08-04 12:32:58: Hotspot 8/4

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Aug 4 12:32:58 PDT 2011

Previous message: Comment asml SNF 2011-07-27 11:38:46: Hotspot Ck-1 hotspot
Next message: Comment asml SNF 2011-08-05 08:46:51: Port 4 Hinges Broken
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

1 hotspot on test wafer. Cleaned E-chuck with tooling. Retest OK.

Previous message: Comment asml SNF 2011-07-27 11:38:46: Hotspot Ck-1 hotspot
Next message: Comment asml SNF 2011-08-05 08:46:51: Port 4 Hinges Broken
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the asml-pcs mailing list