Comment asml SNF 2011-08-05 09:45:37: HOTSPOT CK, 2 HOTSPOTS

lindaohara at snf.stanford.edu lindaohara at snf.stanford.edu
Fri Aug 5 09:45:38 PDT 2011


Found 2 hotspots at 6:00 and 7:00 o'clock positions. ASML cleaned E-Chuck, no hotspots.
PLEASE CHECK THE BACK OF YOUR WAFERS AND SRD THE WAFERS. Inspect the back to make sure that there are no particles before you put the wafers through the ASML.
Thank you,
Linda Ohara
ASML




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