Comment asml SNF 2011-08-09 09:28:50: Hotspot 8/9
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Tue Aug 9 09:28:51 PDT 2011
One hotspot at top/left edge of wafer. Cleaned the E-chuck with tooling. Retest OK.
More information about the asml-pcs
mailing list