Comment asml SNF 2011-08-11 09:58:16: Hotspot 8/11
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Thu Aug 11 09:58:16 PDT 2011
One hotspot at Bottom /Right edge of wafer. Cleaned the E-chuck with tooling. Retest OK.
More information about the asml-pcs
mailing list